Scientific session of the Physical Sciences Division of the Russian Academy of Sciences (31 January 2007)
K.N. Kosheleva,
V.E. Banineb,
N.N. Salashchenkoc,
V.I. Balykina,
Yu.E. Lozovika,
A.M. Popova aInstitute of Spectroscopy, Russian Academy of Sciences, ul. Fizicheskaya 5, Troitsk, Moscow, 108840, Russian Federation bASML Netherlands B.V., De Run 6501, Veldhoven, 5504, The Netherlands cInstitute for Physics of Microstructures, Russian Academy of Sciences, ul. Ul'yanova 46, Nizhnii Novgorod, 603950, Russian Federation
A scientific session of the Physical Sciences Division of the
Russian Academy of Sciences (RAS) was held in the
Conference Hall of the P N Lebedev Physical Institute, RAS
on 31 January 2007. The following reports were presented at
the session:
(1) Koshelev K N (Institute of Spectroscopy, RAS,
Troitsk, Moscow region), Banine V E (ASML, Veldhoven,
the Netherlands), Salashchenko N N (Institute for the Physics
of Microstructures, RAS, Nizhny Novgorod). ’Research and
development in short-wave radiation sources for new-genera-
tion lithography’;
(2) Balykin V I (Institute of Spectroscopy, RAS, Troitsk,
Moscow region). ’Parallel fabrication of nanostructures via
atom projection’;
(3) Lozovik Yu E, Popov A M (Institute of Spectroscopy,
RAS, Troitsk, Moscow region). ’Properties and nanotechnological applications of nanotubes’.
An abridge version of the reports is given below.
DOI:10.1070/PU2007v050n07ABEH006321 URL: https://ufn.ru/en/articles/2007/7/e/ 2-s2.0-35948961904 2007PhyU...50..741K Citation: Koshelev K N, Banine V E, Salashchenko N N, Balykin V I, Lozovik Yu E, Popov A M "Scientific session of the Physical Sciences Division of the Russian Academy of Sciences (31 January 2007)" Phys. Usp.50 741–744 (2007)