VLSI technology: fundamentals and applications

Yu.V. Gulyaev^a, Yu.L. Kopylov
^aKotelnikov Institute of Radioengineering and Electronics of the Russian Academy of Sciences, ul. Mokhovaya 11, kor. 7, Moscow, 125009, Russian Federation

PACS: 85.40.Hp, 01.30.Vv, 85.40.Bh, 85.40.Qx (all)
DOI: 10.1070/PU1988v031n11ABEH005655
URL: https://ufn.ru/en/articles/1988/11/h/
Citation: Gulyaev Yu V, Kopylov Yu L "VLSI technology: fundamentals and applications" Sov. Phys. Usp. 31 1040–1041 (1988)

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Оригинал: Гуляев Ю В, Копылов Ю Л «Технология СБИС: основы и применения» УФН 156 552–553 (1988); DOI: 10.3367/UFNr.0156.198811i.0552

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