VLSI technology: fundamentals and applications

Yu.V. Gulyaev^a, Yu.L. Kopylov
^aKotelnikov Institute of Radioengineering and Electronics of the Russian Academy of Sciences, ul. Mokhovaya 11, kor. 7, Moscow, 125009, Russian Federation

PACS: 85.40.Hp, 01.30.Vv, 85.40.Bh, 85.40.Qx (all)
DOI: 10.1070/PU1988v031n11ABEH005655
URL: https://ufn.ru/en/articles/1988/11/h/
Citation: Gulyaev Yu V, Kopylov Yu L "VLSI technology: fundamentals and applications" Sov. Phys. Usp. 31 1040–1041 (1988)

BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Оригинал: Гуляев Ю В, Копылов Ю Л «Технология СБИС: основы и применения» УФН 156 552–553 (1988); DOI: 10.3367/UFNr.0156.198811i.0552

Cited by (3) Similar articles (20) ↓

B.G. Idlis “Physics and technology of submicron structures” Sov. Phys. Usp. 32 834–834 (1989)
V.S. Dotsenko “Spin glasses, optimization, and biological applications” Sov. Phys. Usp. 32 187–187 (1989)
T.O. Vreden-Kobetskaya “New books in physics” Sov. Phys. Usp. 1 170–177 (1958)
O.A. Pankratov “Two-dimensional systems: physics and new devices” Sov. Phys. Usp. 30 754–755 (1987)
V.G. Terziev “New reference books on magnetic properties of matter” Sov. Phys. Usp. 33 (2) 167–167 (1990)
M.N. Stolyarov “New problems in the theory of nonequilibrium phase transitions” Sov. Phys. Usp. 33 (3) 259–260 (1990)
T.O. Vreden-Kobetskaya “New books on physics” Sov. Phys. Usp. 2 190–193 (1959)
T.O. Vreden-Kobetskaya “New books on physics” Sov. Phys. Usp. 2 498–503 (1959)
V.B. Timofeev “Current state of semiconductor silicon technology and material science” Sov. Phys. Usp. 33 (6) 492–493 (1990)
V.S. Letokhov “Waveguide propagation and diffraction of optical radiation” Sov. Phys. Usp. 31 97–97 (1988)
R.V. Vedrinskii, V.L. Kraizman “Extended and near edge structure of x-ray absorption spectra” Sov. Phys. Usp. 31 97–98 (1988)
M.I. Tribel’skii “Numerical investigations of phase transitions and critical phenomena” Sov. Phys. Usp. 31 99–99 (1988)
I.M. Dremin “Quarks and leptons” Sov. Phys. Usp. 31 177–177 (1988)
S.E. Sigarev “Crystal structures of germanates, stannates and plumbates” Sov. Phys. Usp. 31 178–178 (1988)
E.I. Volkov “Biophysical effects of steady magnetic fields” Sov. Phys. Usp. 31 179–180 (1988)
G.N. Tishchenko “Structure data of organic crystals” Sov. Phys. Usp. 31 180–180 (1988)
A.A. Tseitlin “Concepts and trends in particle physics” Sov. Phys. Usp. 31 285–285 (1988)
A.I. Ryazanov “Dynamics of hierarchical systems” Sov. Phys. Usp. 31 286–287 (1988)
I.L. Fabelinskii “Nonlinear optics” Sov. Phys. Usp. 31 380–381 (1988)
A.P. Silin “Low-energy electron diffraction” Sov. Phys. Usp. 31 381–381 (1988)

The list is formed automatically.