PACS numbers

85.40.Hp Lithography, masks and pattern transfer

Yu.V. Gulyaev, Yu.L. Kopylov “VLSI technology: fundamentals and applications” Sov. Phys. Usp. 31 1040–1041 (1988)
85.40.Hp, 01.30.Vv, 85.40.Bh, 85.40.Qx (all)