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PACS numbers
85.40.Hp Lithography, masks and pattern transfer
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Yu.V. Gulyaev, Yu.L. Kopylov “VLSI technology: fundamentals and applications” 31 1040–1041 (1988)
85.40.Hp, 01.30.Vv, 85.40.Bh, 85.40.Qx ()
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