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PACS numbers
81.07.Oj Nanoelectromechanical systems (NEMS)
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Ya.S. Greenberg, Yu.A. Pashkin, E. Il’ichev “Nanomechanical resonators” Phys. Usp. 55 382–407 (2012)
61.46.−w, 62.25.−g, 81.07.−b, 81.07.Oj ()
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