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On the 100th anniversary of the birth of N G Basov. Conferences and symposia


N G Basov's role in the development of excimer lasers: a half-century history from the launch of the first Xe2 laser at the Lebedev Physical Institute to modern laser systems

 
Lebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, Moscow, 119991, Russian Federation

In a review dedicated to the 100th anniversary of the birth of academician N G Basov, the fate of one of his scientific predictions is traced: obtaining lasing at bound-free transitions of liquid xenon. Launched at the Lebedev Physical Institute (LPI) of the Academy of Sciences of the USSR in 1970, the Xe2 laser pumped by an electron beam marked a new dimension in laser physics: the advent of high-power excimer lasers generating radiation in the range from visible to vacuum ultraviolet. The main types and excitation methods of excimer lasers and the properties of their gain medium are considered. The most powerful pulsed excimer laser systems designed for laser thermonuclear fusion and amplification of UV multiterawatt ultrashort pulses are described, as well as repetition-rate lasers for applications in medicine, microelectronics, material processing, etc.

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Fulltext is also available at DOI: 10.3367/UFNe.2022.11.039357
Keywords: excimer lasers, operating principles, main types, applications
PACS: 42.55.Lt, 42.60.−v, 42.62.−b (all)
DOI: 10.3367/UFNe.2022.11.039357
URL: https://ufn.ru/en/articles/2023/10/f/
001112744100006
2-s2.0-85182878382
2023PhyU...66.1037Z
Citation: Zvorykin V D "N G Basov's role in the development of excimer lasers: a half-century history from the launch of the first Xe2 laser at the Lebedev Physical Institute to modern laser systems" Phys. Usp. 66 1037–1058 (2023)
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Received: 14th, April 2023, 28th, November 2022

Оригинал: Зворыкин В Д «Роль Н.Г. Басова в создании эксимерных лазеров: полувековая история от запуска первого Xe2-лазера в ФИАНе до современных лазерных систем» УФН 193 1103–1126 (2023); DOI: 10.3367/UFNr.2022.11.039357

References (217) ↓ Cited by (4) Similar articles (8)

  1. Houtermans F G Helv. Phys. Acta 33 933 (1960)
  2. Basov N G "Opening remarks" Forth Intern. Quantum Electronics Conf., Phoenix, AZ, April 12-15, 1966; Basov N G IEEE J. Quantum Electron. 2 354 (1966)
  3. Basov N G et al Kratk. Soobshch. Fiz. FIAN (8) 10 (1970)
  4. Basov N G et al JETP Lett. 12 329 (1970); Basov N G et al Pis’ma Zh. Eksp. Teor. Fiz. 12 473 (1970)
  5. Koehler H A et al Appl. Phys. Lett. 21 198 (1972)
  6. Gerardo J M, Johnson A W IEEE J. Quantum Electron. 9 748 (1973)
  7. Hoff P W, Swingle J C, Rhodes C K Appl. Phys. Lett. 23 245 (1973)
  8. Hughes W M, Shannon J, Hunter R Appl. Phys. Lett. 24 488 (1974)
  9. Molchanov A G Sov. Phys. Usp. 15 124 (1972); Molchanov A G Usp. Fiz. Nauk 106 165 (1972)
  10. Eletskii A V Sov. Phys. Usp. 21 502 (1978); Eletskii A V Usp. Fiz. Nauk 125 279 (1978)
  11. Lakoba I S, Yakovlenko S I Sov. J. Quantum Electron. 10 389 (1980); Lakoba I S, Yakovlenko S I Kvantovaya Elektron. 7 677 (1980)
  12. Rhodes Ch K (Ed.) Excimer Lasers (Berlin: Springer-Verlag, 1979); Translated into Russian, Rhodes Ch K (Ed.) Eksimernye Lazery (Moscow: Mir, 1981)
  13. Smirnov B M Sov. Phys. Usp. 26 31 (1983); Smirnov B M Usp. Fiz. Nauk 139 53 (1983)
  14. Molchanov A G Trudy Fiz. Inst. Akad. Nauk 171 54 (1986); Molchanov A G Proc. Lebedev Phys. Inst. 171 72 (1988)
  15. McDaniel E W, Nighan W L (Eds) Gas Lasers (New York: Academic Press, 1982); Translated into Russian, McDaniel E W, Nighan W L (Eds) Gazovye Lazery (Moscow: Mir, 1986)
  16. Slade P D, Fournier G R Opt. Commun. 29 325 (1979)
  17. Gold M G, Thrush B A Chem. Phys. Lett. 29 486 (1974)
  18. Velazco J E, Setser D W J. Chem. Phys. 62 1990 (1975)
  19. Brau C A, Ewing J J Appl. Phys. Lett. 27 435 (1975)
  20. Ewing J J, Brau C A Appl. Phys. Lett. 27 350 (1975)
  21. Searles S K, Hart G A Appl. Phys. Lett. 27 243 (1975)
  22. Hoffman J M, Hays A K, Tisone G C Appl. Phys. Lett. 28 538 (1976)
  23. Murray J R, Powell H T Appl. Phys. Lett. 29 252 (1976)
  24. Mangano J A, Jacob J H Appl. Phys. Lett. 27 495 (1975)
  25. Burnham R, Powell F X, Djeu N Appl. Phys. Lett. 29 30 (1976)
  26. Wang C P et al Appl. Phys. Lett. 28 326 (1976)
  27. Burnham R, Djeu N Appl. Phys. Lett. 29 707 (1976)
  28. Sumida S, Obara M, Fujioka T Appl. Phys. Lett. 33 913 (1978)
  29. Basov N G et al Sov. Tech. Phys. Lett. 11 433 (1985); Basov N G et al Pis’ma Zh. Tekh. Fiz. 11 1044 (1985)
  30. Eden J G et al Appl. Phys. Lett. 35 133 (1979)
  31. Krotz W et al Appl. Phys. Lett. 55 2265 (1989)
  32. Adonin A et al Laser Part. Beams 27 379 (2009)
  33. Christensen C P, Waynant R W Appl. Phys. Lett. 41 794 (1982)
  34. Mendelsohn A J et al Appl. Phys. Lett. 38 603 (1981)
  35. Didenko A N et al Pis’ma Zh. Tekh. Fiz. 12 1245 (1986)
  36. Hill R M et al Appl. Phys. Lett. 34 137 (1979)
  37. Bischel W K et al Appl. Phys. Lett. 34 565 (1979)
  38. Basov N G et al Sov. J. Quantum Electron. 6 505 (1976); Basov N G et al Kvantovaya Elektron. 3 930 (1976)
  39. Basov N G et al Sov. J. Quantum Electron. 7 1401 (1977); Basov N G et al Kvantovaya Elektron. 4 2453 (1977)
  40. Basov N G et al Sov. J. Quantum Electron. 9 629 (1979); Basov N G et al Kvantovaya Elektron. 6 1074 (1979)
  41. Schwentner N, Apkarian V A Chem. Phys. Lett. 154 413 (1989)
  42. Katz A I, Feld J, Apkarian V A Opt. Lett. 14 441 (1989)
  43. Smiley V N Proc. SPIE 1225 2 (1990)
  44. Rosocha L A et al Laser Part. Beams 4 55 (1986)
  45. Rosocha L A et al Fusion Technol. 11 497 (1987)
  46. Sullivan J A, Von Rosenberg C W (Jr.) Laser Part. Beams 4 91 (1986)
  47. Sullivan J A Fusion Technol. 11 684 (1987)
  48. Champagne L F, Dudas A J, Harris N W J. Appl. Phys. 62 1567 (1987)
  49. Walter R F et al Proc. SPIE 1397 71 (1990)
  50. Muller-Horsche E, Osterlin P, Bastling D Proc. SPIE 1225 142 (1990)
  51. Godard B et al Conf. on Lasers and Electrooptics CLEO-93, Baltimore, MD, May 2-7, 1993, Paper CTh1
  52. Zvorykin V D et al Proc. SPIE 5120 223 (2003)
  53. Zvorykin V D et al Plasma Fusion Res. 8 3405046 (2013)
  54. Zvorykin V D et al Laser Part. Beams 19 609 (2001)
  55. Zvorykin V D et al Laser Part. Beams 25 435 (2007)
  56. Ewing J J et al IEEE J. Quantum Electron. 15 368 (1979)
  57. Lowenthal D D et al IEEE J. Quantum Electron. 17 1861 (1981)
  58. Tilleman M M, Jacob J H Appl. Phys. Lett. 50 121 (1987)
  59. Zvorykin V D, Lebo I G, Rozanov V B Kratk. Soobshch. Fiz. FIAN (9-10) 20 (1997)
  60. Zvorykin V D et al Quantum Electron. 43 332 (2013); Zvorykin V D et al Kvantovaya Elektron. 43 332 (2013)
  61. Betti R et al Phys. Rev. Lett. 98 155001 (2007)
  62. Zvorykin V D et al Quantum Electron. 43 339 (2013); Zvorykin V D et al Kvantovaya Elektron. 43 339 (2013)
  63. Zvorykin V D et al Plasma Phys. Rep. 41 112 (2015); Zvorykin V D et al Fiz. Plazmy 41 125 (2015)
  64. Zvorykin V D et al Appl. Opt. 31 (2014)
  65. Robertson K L, Avicola K Proc. SPIE 1225 44 (1990)
  66. Smith M J, Trainor D W, Duzy C IEEE J. Quantum Electron. 26 942 (1990)
  67. Nicholson B W et al IEEE J. Quantum Electron. 26 1285 (1990)
  68. Swingle J C et al J. Appl. Phys. 52 91 (1981)
  69. Murray J R et al IEEE J. Quantum Electron. 15 342 (1979)
  70. Schlitt L 2nd IEEE Intern. Pulsed Power Conf. Digest of Papers, Lubbock, Texas. 1979 p. 269
  71. Bigio I J, Slatkine M IEEE J. Quantum Electron. 19 1426 (1983)
  72. Turnur T P et al Proc. SPIE 1225 23 (1990)
  73. Harris D B et al Fusion Technol. 11 705 (1987)
  74. Hunter A M IEEE J. Quantum Electron. 22 386 (1986)
  75. Sviatoslavsky I N et al Fusion Technol. 21 1470 (1992)
  76. Von Rosenberg C W (Jr.) Fusion Technol. 21 1600 (1992)
  77. Harris D B et al Laser Part. Beams 11 323 (1993)
  78. Obenschain S P et al Phys. Plasmas 3 2098 (1996)
  79. Lehmberg R H, Goldhar J Fusion Sci. Technol. 11 532 (1987)
  80. Lehmberg R H, Schmitt A J, Bodner S E J. Appl. Phys. 62 2680 (1987)
  81. Obenschain S et al Appl. Opt. 34 F103 (2015)
  82. Deniz A V, Obenschain S P Opt. Commun. 106 113 (1994)
  83. Pronko M S IEEE J. Quantum Electron. 30 2147 (1994)
  84. Lehecka T et al Opt. Commun. 117 485 (1995)
  85. Deniz A V et al Opt. Commun. 147 402 (1998)
  86. Pawley C J et al Phys. Plasmas 4 1969 (1997)
  87. Pawley C J et al Fusion Eng. Des. 44 171 (1999)
  88. Weaver J L et al Phys. Plasmas 14 056316 (2007)
  89. Karasik M et al Phys. Plasmas 17 056317 (2010)
  90. Aglitskiy Y et al Phys. Rev. Lett. 109 085001 (2012)
  91. Weaver J L et al Phys. Plasmas 20 022701 (2013)
  92. Karasik M et al Phys. Rev. Lett. 114 085001 (2015)
  93. Zulick C et al Phys. Plasmas 27 072706 (2020)
  94. Sethian J D et al IEEE Trans. Plasma Sci. 38 1690 (2010)
  95. Bodner S E, Schmitt A J, Sethian J D High Power Laser Sci. Eng. 1 2 (2013)
  96. Kehne D M et al Rev. Sci. Instrum. 84 013509 (2013)
  97. Igumenshchev I V et al Phys. Rev. Lett. 110 145001 (2013)
  98. Sethian J D et al Fusion 43 1693 (2003)
  99. Sethian J D et al Proc. IEEE 92 1043 (2004)
  100. Stamper J A et al Nucl. Fusion 44 745 (2004)
  101. Myers M C et al Nucl. Fusion 247 (2004)
  102. Obenschain S P et al Phys. Plasmas 13 056320 (2006)
  103. Schmitt A J et al Fusion Sci. Technol. 56 377 (2009)
  104. Obenschain S P, Sethian J D, Schmitt A J Fusion Sci. Technol. 56 594 (2009)
  105. Schmitt A J et al Phys. Plasmas 17 042701 (2010)
  106. Shcherbakov V A Sov. J. Plasma Phys. 9 240 (1983); Shcherbakov V A Fiz. Plazmy 9 409 (1983)
  107. Lindl J Phys. Plasmas 2 3933 (1995)
  108. Lehmberg R H, Giuliani J L, Schmitt A J J. Appl. Phys. 106 023103 (2009)
  109. Abu-Shawareb H et al (Indirect Drive ICF Collab.) Phys. Rev. Lett. 129 075001 (2022)
  110. Zylstra A B et al Phys. Rev. E 106 025202 (2022)
  111. National Ignition Facility achieves fusion ignition, https://llnl.gov/news/national-fusion-facility-achievs ignition
  112. DOE National Laboratory Makes History by Achieving Fusion Ignition, Temporal M et al High Power Laser Sci. Eng. 2 e8 (2014) https://energy.gov/articles/doe-national-laboratory-makes-history-achieving-fusion-ignition
  113. Galakhov I V et al Fusion Eng. Des. 44 51 (1999)
  114. Garanin S G, Krokhin O N Herald Russ. Acad. Sci. 81 204 (2011); Garanin S G, Krokhin O N Vestn. Ross. Akad. Nauk 81 495 (2011)
  115. He X T et al Fusion Eng. Des. 44 57 (1999)
  116. Zheng W et al High Power Laser Sci. Eng. 4 e21 (2016)
  117. Gong T et al Matter Radiat. Extremes 4 055202 (2019)
  118. Erlandson A C et al Opt. Mater. Express 1 1341 (2011)
  119. Edwards C B, Danson C N High Power Laser Sci. Eng. 3 e4 (2015)
  120. Suda A, Obara M, Noguchi A J. Appl. Phys. 60 3791 (1986)
  121. Wolford M F et al High Energy Density Phys. 36 100801 (2020)
  122. Bodner S E High Power Laser Sci. Eng. 7 e63 (2019)
  123. Obenschain S P Philos. Trans. R. Soc. A 378 20200031 (2020)
  124. Edwards C B et al AIP Conf. Proc. 100 59 (1983)
  125. Barr J R M et al Opt. Commun. 66 127 (1988)
  126. Partanen J P, Shaw M J J. Opt. Soc. Am. B 3 1374 (1986)
  127. Shaw M J et al J. Opt. Soc. Am. B 3 1466 (1986)
  128. Hooker C J, Lister J M D, Rodgers P A Opt. Commun. 82 497 (1991)
  129. Shaw M J et al Opt. Lett. 16 1320 (1993)
  130. Shaw M J Laser Part. Beams 9 309 (1991)
  131. Shaw M J et al Laser Part. Beams 11 331 (1993)
  132. Divall E J et al J. Mod. Opt. 43 1025 (1996)
  133. Shaw M J et al Fusion Eng. Des. 44 209 (1999)
  134. Foldes I B, Szatmari S Laser Part. Beams 26 475 (2008)
  135. Tabak M et al Phys. Plasmas 1 1626 (1994)
  136. Tabak M et al Phys. Plasmas. 12 057305 (2005)
  137. Gus’kov S Yu Fiz. Plazmy 39 3 (2013)
  138. Kim Y P, Hutchinson M H R Appl. Phys. B 49 469 (1989)
  139. Ross I N et al J. Mod. Opt. 37 555 (1990)
  140. Martin W E, Winfield R J Appl. Opt. 27 567 (1988)
  141. Strickland D, Mourou G Opt. Commun. 56 219 (1985)
  142. Houliston J R et al Opt. Commun. 104 350 (1994)
  143. Ross I N et al Opt. Commun. 109 288 (1994)
  144. Owadano Y et al Laser Part. Beams 7 383 (1989)
  145. Owadano Y et al Laser Part. Beams 11 347 (1993)
  146. Tanimoto M et al Laser Part. Beams 4 71 (1986)
  147. Tomie T et al Laser Part. Beams 8 299 (1990)
  148. Okuda I et al Fusion Eng. Des. 44 377 (1999)
  149. Owadano Y et al Fusion Eng. Des. 44 91 (1999)
  150. Owadano Y et al Inertial Fusion Sciences And Applications 2001 (Eds K A Tanaka, D D Meyerhofer, J Meyer-ter-Vehn) (Amsterdam: Elsevier, 2001) p. 465
  151. Matsumoto Y et al Fusion Eng. Des. 44 383 (1999)
  152. Takahashi E et al Fusion Eng. Des. 44 133 (1999)
  153. Ueda K Laser Part. Beams 7 375 (1989)
  154. Sasaki A et al J. Appl. Phys. 65 231 (1989)
  155. Ueda K et al Laser Part. Beams 11 31 (1993)
  156. Nishioka H et al Opt. Lett. 14 692 (1989)
  157. Watanabe S et al J. Opt. Soc. Am. B 6 1870 (1989)
  158. Wang N et al Laser Part. Beams 20 119 (2002)
  159. Shan Y et al Laser Part. Beams 20 123 (2002)
  160. Xiang Y Proc. SPIE 6279 62795Z (2007)
  161. Gao Z Proc. SPIE 8796 87961R (2013)
  162. Zhao X et al Proc. SPIE 9255 925523 (2015)
  163. Zhang Y et al Proc. SPIE 9543 95431C (2015)
  164. Basov N G et al Pis’ma Zh. Tekh. Fiz. 8 245 (1982)
  165. Baranov V Yu et al Pis’ma Zh. Tekh. Fiz. 9 201 (1983)
  166. Bychkov Yu I et al Sov. J. Quantum Electron. 17 605 (1987); Bychkov Yu I et al Kvantovaya Elektron. 14 953 (1987)
  167. Bychkov Yu I et al Pis’ma Zh. Tekh. Fiz. 14 566 (1988)
  168. Abdullin E N et al Quantum Electron. 23 564 (1993); Abdullin E N et al Kvantovaya Elektron. 20 652 (1993)
  169. Bugaev S P et al Sov. J. Quantum Electron. 34 801 (2004); Bugaev S P et al Kvantovaya Elektron. 34 801 (2004)
  170. Aristov A I et al Opt. Atmos. Okeana 22 1029 (2009)
  171. Bychkov Yu I et al Sov. J. Quantum Electron. 17 605 (1987); Bychkov Yu I et al Kvantovaya Elektron. 43 190 (2013)
  172. Alekseev S V et al Izv. Vyssh. Uchebn. Zaved. 62 (11) 178 (2019)
  173. Basov N G et al Sov. J. Quantum Electron. 21 816 (1991); Basov N G et al Kvantovaya Elektron. 18 902 (1991)
  174. Arlantsev S V et al Quantum Electron. 24 223 (1994); Arlantsev S V et al Kvantovaya Elektron. 21 241 (1994)
  175. Basov N G et al J. Sov. Laser Res. 14 326 (1993)
  176. Basov N G et al Quantum Electron. 21 13 (1994); Basov N G et al Kvantovaya Elektron. 21 15 (1994)
  177. Zvorykin V D et al Laser Part. Beams 19 609 (2001)
  178. Zvorykin V D et al Laser Part. Beams 25 435 (2007)
  179. Zvorykin V D, Levchenko A O, Ustinovskii N N Quantum Electron. 40 381 (2010); Zvorykin V D, Levchenko A O, Ustinovskii N N Kvantovaya Elektron. 40 381 (2010)
  180. McIntyre I A, Rhodes C K J. Appl. Phys. 69 R1 (1991)
  181. Luk T S et al Opt. Lett. 14 1113 (1989)
  182. Couairon A, Mysyrowicz A Phys. Rep. 47 441 (2007)
  183. Smetanin I V et al Nucl. Instrum. Meth. Phys. Res. B 369 87 (2016)
  184. Shutov A V Appl. Phys. Lett. 111 224104 (2017); Shutov A V Appl. Phys. Lett. 113 189902 (2018), Erratum
  185. Shipilo D E et al Opt. Express 25 25386 (2017)
  186. Zvorykin V D et al J. Opt. Soc. Am. B 36 G25 (2019)
  187. Zvorykin V D et al Nucl. Instrum. Meth. Phys. Res. B 355 227 (2015)
  188. Zvorykin V D et al Quantum Electron. 44 431 (2014); Zvorykin V D et al Kvantovaya Elektron. 44 431 (2014)
  189. Zvorykin V D et al Laser Phys. Lett. 13 125404 (2016)
  190. Zvorykin V D et al Matter Radiat. Extremes 5 045401 (2020)
  191. Zvorykin V D et al Nucl. Instrum. Meth. Phys. Res. B 402 331 (2017)
  192. Askar’yan G A Sov. Phys. JETP 1 162 (1965); Askar’yan G A Pis’ma Zh. Eksp. Teor. Fiz. 1 18 (1965)
  193. Zvorykin V D et al Kratk. Soobshch. Fiz. FIAN (2) 49 (2010)
  194. Zvorykin V D et al Phys. Plasmas 19 033509 (2012)
  195. Zahnow C F p. 56, Paper 1023-09
  196. Walter R F et al Proc. SPIE 1397 71 (1990)
  197. Wolford M F et al Appl. Phys. Lett. 84 326 (2004)
  198. Hegeler F et al Phys. Plasmas 11 5010 (2004)
  199. Petrov G M, Giuliani J L, Dasgupta A J. Appl. Phys. 91 2662 (2002)
  200. Lehmberg R H, Giuliani J L J. Appl. Phys. 94 31 (2003)
  201. Sethian J D IEEE Trans. Plasma Sci. 28 1333 (2000)
  202. Hegeler F et al IEEE Trans. Dielectr. Electr. Insul. 18 1205 (2011)
  203. Friedman M et al J. Appl. Phys. 95 2797 (2004)
  204. Lu B et al J. Fusion Energy 30 453 (2011)
  205. Lu B et al Fusion Eng. Des. 87 352 (2012)
  206. Wolford M F et al Proc. SPIE 6454 645407 (2007)
  207. Wolford M F et al Opt. Eng. 47 104202 (2008)
  208. Burnham R, Djeu N Appl. Phys. Lett. 29 707 (1976)
  209. Tillotson J M SPIE Intern. Conf. on Lasers’ 88, Lake Tahoe, NV, December 4-9, 1988, Paper H1.2
  210. Borisov V M et al Sov. J. Quantum Electron. 17 123 (1990); Borisov V M et al Kvantovaya Elektron. 17 164 (1990)
  211. Baranov V Yu et al Sov. J. Quantum Electron. 18 1065 (1988); Baranov V Yu et al Kvantovaya Elektron. 15 1712 (1988)
  212. Heman W J W et al Proc. SPIE 1225 132 (1990)
  213. Watanabe S et al Intern. Quantum Electronics Conf. CLEO-90/IQEC-90, Anaheim, Cal, May 24-28, 1990, Paper JMA4
  214. Szatmári S et al Opt. Commun. 63 305 (1987)
  215. Nabekawa Y et al Opt. Lett. 18 1922 (1993)
  216. Nabekawa Y et al Opt. Lett. 21 647 (1996)
  217. Nabekawa Y et al Opt. Lett. 26 807 (2001)

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