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Instruments and methods of investigation


Study of micropores in single crystals by in-line phase contrast imaging with synchrotron radiation

 a,  b
a Ioffe Institute, ul. Polytekhnicheskaya 26, St. Petersburg, 194021, Russian Federation
b National Research Centre ‘Kurchatov Institute’, pl. akad. Kurchatova 1, Moscow, 123182, Russian Federation

Some single crystals that are of importance for engineering contain micropores of various shapes, including micropipes, empty cylinders whose section sizes vary from fractions of micrometer to several micrometers. We describe properties of such objects in a silicon carbide single crystal and a method of observing and exploring those objects, namely, in-line phase contrast imaging with synchrotron radiation. We also review the history of development and current status of this method.

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Fulltext is also available at DOI: 10.3367/UFNe.2018.06.038371
Keywords: single crystals, silicon carbide, micropores, micropipes, phase contrast, synchrotron radiation
PACS: 42.25.Fx, 42.25.Kb, 61.72.−y, 61.72.Ff, 61.72.Lk (all)
DOI: 10.3367/UFNe.2018.06.038371
URL: https://ufn.ru/en/articles/2019/6/d/
000484015200004
2-s2.0-85072924094
2019PhyU...62..602A
Citation: Argunova T S, Kohn V G "Study of micropores in single crystals by in-line phase contrast imaging with synchrotron radiation" Phys. Usp. 62 602–616 (2019)
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Received: 16th, April 2018, revised: 15th, June 2018, 27th, June 2018

Оригинал: Аргунова Т С, Кон В Г «Исследование микропор в монокристаллах методом фазово-контрастного изображения на просвет в синхротронном излучении» УФН 189 643–658 (2019); DOI: 10.3367/UFNr.2018.06.038371

References (166) ↓ Cited by (10) Similar articles (8)

  1. Kimoto T Prog. Cryst. Growth Charact. Mater. 62 329 (2016)
  2. Luchinin V, Tairov Yu Sovremennaya Elektronika (7) 12 (2009)
  3. Lebedev A, Sbruev S Elektronika (5) 28 (2006)
  4. Frank F C Acta Cryst. 4 497 (1951)
  5. Verma A, Krishna P Polymorphism And Polytypism In Crystals (New York: Wiley, 1966); Per. na russk. yaz., Verma A, Krishna P Polimorfizm i Politipizm v Kristallakh (M.: Mir, 1969)
  6. Si W et al J. Electron. Mater. 26 128 (1997)
  7. Ma X J. Appl. Phys. 99 063513 (2006)
  8. Heindl J et al J. Cryst. Growth 179 510 (1997)
  9. Strunk H P et al Adv. Eng. Mater. 2 386 (2000)
  10. Ma X Mater. Sci. Eng. B 129 216 (2006)
  11. Heindl J et al Phys. Rev. Lett. 80 740 (1998)
  12. Dudley M et al Appl. Phys. Lett. 75 784 (1999)
  13. Ohtani N et al J. Cryst. Growth 226 254 (2001)
  14. Eddy C R (Jr.), Gaskill D K Science 324 1398 (2009)
  15. Müller St G et al J. Cryst. Growth 352 39 (2012)
  16. Gabor D Nature 161 777 (1948)
  17. Weon B M et al Int. J. Nanotechnol. 3 280 (2006)
  18. Nugent K A Adv. Phys. 59 1 (2010)
  19. Mayo S C et al Materials 5 937 (2012)
  20. Lider V V, Koval’chuk M V Kristallogr. 58 764 (2013); Lider V V, Kovalchuk M V Crystallogr. Rep. 58 769 (2013)
  21. Endrizzi M Nucl. Instrum. Meth. Phys. Res. A 878 88 (2018)
  22. Snigirev A et al Rev. Sci. Instrum. 66 5486 (1995)
  23. Cloetens P et al J. Phys. D 29 133 (1996)
  24. Takasu S, Shimanuki S J. Cryst. Growth 24-25 641 (1974)
  25. Hawley M et al Science 25 1587 (1991)
  26. Qian W et al Appl. Phys. Lett. 67 2284 (1995)
  27. Valcheva E, Paskova T, Monemar B J. Cryst. Growth 255 19 (2003)
  28. Chernov A A Usp. Fiz. Nauk 73 277 (1961); Chernov A A Sov. Phys. Usp. 4 116 (1961)
  29. Pandey D, Krishna P Mater. Sci. Eng. 20 243 (1975)
  30. Krishna P, Jiang S-S, Lang A R J. Cryst. Growth 71 41 (1985)
  31. Tairov Yu M, Tsvetkov V F J. Cryst. Growth 52 146 (1981)
  32. Glass R C et al J. Cryst. Growth 132 504 (1993)
  33. Neudeck P G et al IEEE Trans. Electron. Dev. 46 478 (1999)
  34. Huang X R et al J. Appl. Cryst. 32 516 (1999)
  35. Gutkin M Yu et al J. Appl. Phys. 100 093518 (2006)
  36. Gutkin M Yu et al Phys. Rev. B 76 064117 (2007)
  37. Gutkin M Yu et al J. Appl. Phys. 106 123515 (2009)
  38. Gutkin M Yu et al Silicon Carbide — Materials, Processing And Applications In Electronic Devices (Ed. M Mukherjee) (Croatia: Intech Publ., 2011) p. 187
  39. Argunova T S et al Microscopy: Advances In Scientific Research And Education (Ed. A M`ndez-Vilas) (Badajoz, Spain: Formatex Research Center, 2014) p. 955
  40. Gutkin M Yu et al Appl. Phys. Lett. 83 2157 (2003)
  41. Gutkin M Yu et al J. Appl. Phys. 94 7076 (2003)
  42. Gutkin M Yu et al Proc. SPIE 5831 125 (2005)
  43. Argunova T S i dr Poverkhnost’ (8) 59 (2005)
  44. Augustine G et al Phys. Status Solidi B 202 137 (1997)
  45. Takahashi J, Ohtani N Phys. Status Solidi B 202 163 (1997)
  46. Nakamura D et al Nature 430 1009 (2004)
  47. Mokhov E N, Nagalyuk S S Pis’ma ZhTF 37 (21) 25 (2011); Mokhov E N, Nagalyuk S S Tech. Phys. Lett. 37 999 (2011)
  48. Argunova T S et al Mater. Sci. Forum 281-283 1011 (2015)
  49. Argunova T S i dr Fiz. Tverd. Tela 57 2400 (2015); Argunova T S et al Phys. Solid State 57 2473 (2015)
  50. Argunova T S et al J. Mater. Sci. 52 4244 (2017)
  51. Mokhov E N et al CrystEngComm. 19 3192 (2017)
  52. Argunova T S et al Crystals 7 (6) 163 (2017)
  53. Denisov A V et al J. Cryst. Growth 344 38 (2012)
  54. Bunoiu O M, Duffar Th, Nicoara I Prog. Cryst. Growth Character. Mater. 56 123 (2010)
  55. Kohn V, Snigireva I, Snigirev A Phys. Rev. Lett. 85 2745 (2000)
  56. Kohn V, Snigireva I, Snigirev A Opt. Commun. 198 293 (2001)
  57. Snigireva I, Kohn V, Snigirev A Nucl. Instrum. Meth. A 467-468 925 (2001)
  58. Snigirev A A i dr Poverkhnost’ (1) 3 (2007); Snigirev A A et al J. Synch. Investig. 1 1 (2007)
  59. Kak A C, Slaney M Principles Of Computerized Tomographic Imaging (New York: IEEE Press, 1988)
  60. Stevenson A W et al Nucl. Instrum. Meth. Phys. Res. B 199 427 (2003)
  61. Wu X, Liu H J. X-Ray Sci. Technol. 11 33 (2003)
  62. Agliozzo S, Cloetens P J. Microscopy 216 62 (2004)
  63. Zabler S et al Rev. Sci. Instrum. 76 073705 (2005)
  64. Nesterets Ya I et al Rev. Sci. Instrum. 76 093706 (2005)
  65. Arhatari B D et al Rev. Sci. Instrum. 75 5271 (2004)
  66. Arhatari B D et al Rev. Sci. Instrum. 76 113704 (2005)
  67. Nesterets Ya I et al Opt. Commun. 259 19 (2006)
  68. Nesterets Ya I Opt. Commun. 281 533 (2008)
  69. Gureyev T E et al Opt. Express 16 3223 (2008)
  70. Gureyev T E, Roberts A, Nugent K A J. Opt. Soc. Am. A 12 1932 (1995)
  71. Gureyev T E, Roberts A, Nugent K A J. Opt. Soc. Am. A 12 1942 (1995)
  72. Gureyev T E, Nugent K A J. Opt. Soc. Am. A 13 1670 (1996)
  73. Nugent K A et al Phys. Rev. Lett. 77 2961 (1996)
  74. Kohn V G Phys. Scripta 56 14 (1997)
  75. Nakajima N Appl. Opt. 37 6219 (1998)
  76. Cong W-X, Chen N-X, Gu B-Y Appl. Opt. 37 6906 (1998)
  77. Gureyev T E, Wilkins S W Opt. Commun. 147 229 (1998)
  78. Tommasini R et al Opt. Commun. 153 339 (1998)
  79. Paganin D, Nugent K A Phys. Rev. Lett. 80 2586 (1998)
  80. Gureyev T E et al J. Phys. D 32 563 (1999)
  81. Cheng J, Han S Opt. Commun. 172 17 (1999)
  82. Gureyev T E Optik 110 263 (1999)
  83. Gureyev T E et al Phys. Rev. Lett. 86 5827 (2001)
  84. Paganin D et al J. Microscopy 206 33 (2002)
  85. Mayo S C et al J. Microscopy 207 79 (2002)
  86. Gureyev T E et al J. Synchrotron Rad. 9 148 (2002)
  87. Suzuki Y, Yagi N, Uesugi K J. Synchrotron Rad. 9 160 (2002)
  88. Schelokov I, Weitkamp T, Snigirev A Opt. Commun. 213 247 (2002)
  89. Hennelly B, Sheridan J T Opt. Commun. 226 61 (2003)
  90. Gureyev T E et al Opt. Commun. 231 53 (2004)
  91. Kohn V et al Nucl. Instrum. Meth. Phys. Res. A 543 306 (2005)
  92. Gureyev T E et al Opt. Commun. 259 569 (2006)
  93. Shioya H, Gohara K Opt. Commun. 266 88 (2006)
  94. Marchesini S Rev. Sci. Instrum. 78 011301 (2007)
  95. Paganin D M, Gureyev T E Opt. Commun. 281 965 (2008)
  96. Langer M et al Med. Phys. 35 4556 (2008)
  97. Kashyap Y S et al J. Synchrotron Rad. 17 799 (2010)
  98. Burvall A et al Opt. Express 19 10359 (2011)
  99. Weitkamp T et al J. Synchrotron Rad. 18 617 (2011)
  100. Diemoz P C et al J. Synchrotron Rad. 22 1072 (2015)
  101. Gureyev T E et al J. Opt. Soc. Am. A 34 2251 (2017)
  102. Raven C et al Appl. Phys. Lett. 69 1826 (1996)
  103. Bronnikov A V Opt. Commun. 171 239 (1999)
  104. Spanne P et al Phys. Med. Biol. 44 741 (1999)
  105. Cloetens P et al Appl. Phys. Lett. 75 2912 (1999)
  106. Cloetens P et al Proc. SPIE 3772 279 (1999)
  107. Baruchel J et al J. Synchrotron Rad. 7 196 (2000)
  108. Barty A et al Opt. Commun. 175 329 (2000)
  109. Weitkamp T et al Proc. SPIE 4503 92 (2002)
  110. McMahon P J et al Opt. Commun. 217 53 (2003)
  111. Peele A G et al Rev. Sci. Instrum. 76 083707 (2005)
  112. Zabler S et al Opt. Express 14 8584 (2006)
  113. Groso A et al Appl. Phys. Lett. 88 214104 (2006)
  114. Gureyev T E, Nesterets Ya I, Mayo S C Opt. Commun. 280 39 (2007)
  115. Arhatari B D, De Carlo F, Peele A G Rev. Sci. Instrum. 78 053701 (2007)
  116. Vagberg W et al Sci. Rep. 5 16625 (2015)
  117. Baran P et al Phys. Med. Biol. 62 2315 (2017)
  118. Nesterets Ya I, Gureyev T E, Dimmock M R J. Phys. D 51 115402 (2018)
  119. Gerchberg R W, Saxton W O Optik 35 237 (1975)
  120. Pfeiffer F Nature Photon. 12 9 (2018)
  121. Bonse U, Busch F Prog. Biophys. Molec. Biol. 65 133 (1996)
  122. Dorenbos P et al IEEE Trans. Nucl. Sci. 42 2190 (1995)
  123. Martin T, Koch A J. Synchrotron Rad. 13 180 (2006)
  124. Rack A et al Nucl. Instrum. Meth. Phys. Res. A 586 327 (2008)
  125. Danilewsky A N et al Nucl. Instrum. Meth. Phys. Res. B 266 2035 (2008)
  126. Kazimirov A et al J. Synchrotron Rad. 13 204 (2006)
  127. Rack A et al J. Synchrotron Rad. 17 496 (2010)
  128. Kohn V G, Argunova T S, Je J H Appl. Phys. Lett. 91 171901 (2007)
  129. Afanas’ev A, Kon V Kristallogr. 22 622 (1977)
  130. Matsushita T, Hashizume H Handbook Of Synchrotron Radiation (Amsterdam: North-Holland, 1983)
  131. Dudley M, Huang X R, Huang W J. Phys. D 32 A139 (1999)
  132. Vetter W, Dudley M J. Appl. Cryst. 34 20 (2001)
  133. Bowen D K, Tanner B K High Resolution X-ray Diffractometry And Topography (London: Taylor and Francis, 1998); Per. na russk. yaz., Bouen D K, Tanner B K Vysokorazreshayushchaya Rentgenovskaya Difraktometriya i Topografiya (SPb.: Nauka, 2002)
  134. Gutkin M Yu et al Appl. Phys. Lett. 93 151905 (2008)
  135. Argunova T S, Kon V G, Je J H Poverkhnost’ (12) 48 (2008); Argunova T S, Kohn V G, Je J H J. Surf. Investig. 2 861 (2008)
  136. Argunova T S et al Phys. Status Solidi A 206 1833 (2009)
  137. Vodakov Yu A et al Phys. Status Solidi B 202 177 (1997)
  138. ImageJ. Download, http://imagej.nih.gov/ij/download.html
  139. Srolovitz D J et al Scripta Mater. 39 379 (1998)
  140. Hirth J P Acta Mater. 47 1 (1998)
  141. Argunova T S et al Physics And Technology Of Silicon Carbide Devices (Ed. Y Hijikata) (Croatia: Intech Publ., 2013) p. 27
  142. Argunova T S i dr Fiz. Tverd. Tela 57 733 (2015); Argunova T S et al Phys. Solid State 57 752 (2015)
  143. Ohsato H, Kato T, Okuda T Mater. Sci. Semicond. Process. 4 483 (2001)
  144. Ma X, Parker M, Sudarshan T S Appl. Phys. Lett. 80 3298 (2002)
  145. Strunk H P J. Cryst. Growth 160 184 (1996)
  146. Kamata I et al Jpn. J. Appl. Phys. 39 6496 (2000)
  147. Epelbaum B M, Hofmann D J J. Cryst. Growth 225 1 (2001)
  148. Yakimova R et al J. Appl. Phys. 98 034905 (2005)
  149. Gutkin M Yu et al J. Appl. Phys. 92 889 (2002)
  150. Gutkin M Yu et al Phys. Status Solidi A 209 1432 (2012)
  151. Sheinerman A et al Mater. Sci. Forum 740-742 597 (2013)
  152. Kohn V G, Argunova T S, Je J H J. Phys. D 43 442002 (2010)
  153. Kon V G, Argunova T S, Je J H Poverkhnost’ (1) 5 (2011); Kohn V G, Argunova T S, Je J H J. Surf. Invest. 5 1 (2011)
  154. Kon V G, Argunova T S, Je J H Poverkhnost’ (10) 60 (2012); Kohn V G, Argunova T S, Je J H J. Surf. Invest. 6 840 (2012)
  155. Kohn V G, Argunova T S, Je J H AIP Adv. 3 122109 (2013)
  156. Kohn V G, Argunova T S, Je J H AIP Adv. 4 097134 (2014)
  157. Argunova T S i dr Kristallogr. 61 879 (2016); Argunova T S et al Crystallogr. Rep. 61 914 (2016)
  158. Van Loan C Computational Frameworks For The Fast Fourier Transform (Philadelphia: SIAM, 1992)
  159. Mancini L et al Phil. Mag. A 78 1175 (1998)
  160. Gastaldi J et al J. Phys. D 32 A152 (1999)
  161. Agliozzo S et al Phys. Rev. B 69 144204 (2004)
  162. Hwu Y et al J. Phys. D 35 R105 (2002)
  163. Baik S et al Rev. Sci. Instrum. 75 4355 (2004)
  164. Hwu Y et al Phys. Med. Biol. 49 501 (2004)
  165. Meuli R et al Eur. Radiol. 14 1550 (2004)
  166. Tsai W L et al Nature 417 139 (2002)
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