Issues

 / 

2017

 / 

February

  

Reviews of topical problems


Material surface ablation produced by ultrashort laser pulses

 a,  a, b, c,  d
a Lebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, Moscow, 119991, Russian Federation
b National Research Nuclear University ‘MEPhI’, Kashirskoe shosse 31, Moscow, 115409, Russian Federation
c ITMO University, Kronverksky Pr. 49, bldg. A, St. Petersburg, 197101, Russian Federation
d Prokhorov General Physics Institute of the Russian Academy of Sciences, ul. Vavilova 38, Moscow, 119991, Russian Federation

Different basic mechanisms of material surface ablation produced by ultrashort laser pulses are considered in succession with increasing the supplied laser energy density: the low-threshold ultrafast plasma expansion at the electron dynamics stage, spallative melt ablation, and explosive hydrodynamic supercritical fluid expansion, including the related sequence of basic relaxation processes.

Fulltext pdf (672 KB)
Fulltext is also available at DOI: 10.3367/UFNe.2016.09.037974
Keywords: ultrashort (femtosecond) laser pulses, surface ablation, ultrafast laser plasma ablation, spallative ablation, shock waves, unloading waves, homogeneous boiling, phase explosion, hydrodynamic supercritical fluid expansion
PACS: 79.20.Eb, 79.20.Ds (all)
DOI: 10.3367/UFNe.2016.09.037974
URL: https://ufn.ru/en/articles/2017/2/b/
000401039000002
2-s2.0-85019077961
2017PhyU...60..149I
Citation: Ionin A A, Kudryashov S I, Samokhin A A "Material surface ablation produced by ultrashort laser pulses" Phys. Usp. 60 149–160 (2017)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Received: 3rd, April 2016, revised: 27th, September 2016, 30th, September 2016

Оригинал: Ионин А А, Кудряшов С И, Самохин А А «Абляция поверхности материалов под действием ультракоротких лазерных импульсов» УФН 187 159–172 (2017); DOI: 10.3367/UFNr.2016.09.037974

References (157) ↓ Cited by (85) Similar articles (20)

  1. Prokhorov A M, Anisimov S I, Pashinin P P Usp. Fiz. Nauk 119 401 (1976); Prokhorov A M, Anisimov S I, Pashinin P P Sov. Phys. Usp. 19 547 (1976)
  2. Afanas’ev Yu V, Isakov V A, Krokhin O N Zh. Eksp. Teor. Fiz. 81 1714 (1981); Afanas’ev Yu V, Isakov V A, Krokhin O N Sov. Phys. JETP 54 910 (1981)
  3. Agranat M B i dr. Pis’ma ZhETF 30 182 (1979); Agranat M B et al. JETP Lett. 30 167 (1979)
  4. Liu J M et al. Appl. Phys. Lett. 39 755 (1981)
  5. Yen R et al. Appl. Phys. A 27 153 (1982)
  6. Kryukov P G Femtosekundnye Impul’sy. Vvedenie v Novuyu Oblast’ Lazernoi Fiziki (M.: Fizmatlit, 2008); Kryukov P G Usp. Fiz. Nauk 183 897 (2013); Kryukov P G Phys. Usp. 56 849 (2013); Kryukov P G Usp. Fiz. Nauk 185 817 (2015); Kryukov P G Phys. Usp. 58 762 (2015)
  7. Anisimov S I, Kapeliovich B L, Perel’man T L Zh. Eksp. Teor. Fiz. 66 776 (1974); Anisimov S I, Kapeliovich B L, Perel’man T L Sov. Phys. JETP 39 375 (1974)
  8. Allen P B Phys. Rev. Lett. 59 1460 (1987)
  9. Akhmanov S A i dr. Usp. Fiz. Nauk 147 675 (1985); Akhmanov S A et al. Sov. Phys. Usp. 28 1084 (1985)
  10. Bäuerle D Laser Processing And Chemistry (Berlin: Springer, 2000)
  11. Koroteev N I, Shumai I L Fizika Moshchnogo Lazernogo Izlucheniya (M.: Nauka, 1991)
  12. Veiko V P i dr. Vzaimodeistvie Lazernogo Izlucheniya s Veshchestvom: Silovaya Optika (M.: Fizmatlit, 2008)
  13. Anisimov S I, Luk’yanchuk B S Usp. Fiz. Nauk 172 301 (2002); Anisimov S I, Luk’yanchuk B S Phys. Usp. 45 293 (2002)
  14. Wellershoff S S et al. Appl. Phys. A 69 S99 (1999)
  15. Agranat M B i dr. Pis’ma ZhETF 101 671 (2015); Agranat M B et al. JETP Lett. 101 598 (2015)
  16. Glezer E N et al. Phys. Rev. B 51 6959 (1995)
  17. Kudryashov S I et al. Phys. Rev. B 75 085207 (2007)
  18. Apostolova T et al. Opt. Eng. 51 121808 (2012)
  19. Reitze D H et al. Phys. Rev. B 40 11986(R) (1989)
  20. Golosov E V i dr. Zh. Eksp. Teor. Fiz. 140 21 (2011); Golosov E V et al. JETP 113 14 (2011)
  21. Wang X Y et al. Phys. Rev. B 50 8016 (1994)
  22. Fujimoto J G et al. Phys. Rev. Lett. 53 1837 (1984)
  23. Ang L K, Pant M Phys. Plasmas 20 056705 (2013)
  24. Amoruso S et al. Appl. Surf. Sci. 186 358 (2002)
  25. Anisimov S I, Benderskii V A, Farkash D Usp. Fiz. Nauk 122 185 (1977); Anisimov S I, Benderskii V A, Farkas G Phys. Usp. 20 467 (1977)
  26. Shank C V, Yen R, Hirlimann C Phys. Rev. Lett. 50 454 (1983)
  27. Downer M C, Fork R L, Shank C V J. Opt. Soc. Am. B 2 595 (1985)
  28. Reitze D H, Ahn H, Downer M C Phys. Rev. B 45 2677 (1992)
  29. Wang X Y, Downer M C Opt. Lett. 17 1450 (1992)
  30. Evans R et al. Phys. Rev. Lett. 77 3359 (1996)
  31. Von der Linde D, Sokolowski-Tinten K Appl. Surf. Sci. 154-155 1 (2000)
  32. Von der Linde D, Sokolowski-Tinten K, Bialkowski J Appl. Surf. Sci. 109-110 1 (1997)
  33. Cavalleri A et al. J. Appl. Phys. 85 3301 (1999)
  34. Schmidt V, Husinsky W, Betz G Phys. Rev. Lett. 85 3516 (200)
  35. Ye M, Grigoropoulos C P J. Appl. Phys. 89 5183 (2001)
  36. Hulin D et al. Phys. Rev. Lett. 52 1998 (1984)
  37. Preuss S, Demchuk A, Stuke M Appl. Phys. A 61 33 (1995)
  38. Chichkov B N et al. Appl. Phys. A 63 109 (1996)
  39. Sokolowski-Tinten K et al. Proc. SPIE 3343 46 (1998)
  40. Sokolowski-Tinten K et al. Phys. Rev. Lett. 81 224 (1998)
  41. Anisimov S I i dr. Pis’ma ZhETF 77 731 (2003); Anisimov S I et al. JETP Lett. 77 606 (2003)
  42. Perez D, Lewis L J Phys. Rev. Lett. 89 255504 (2002)
  43. Oguri K et al. Phys. Rev. Lett. 99 165003 (2007)
  44. Norman G E et al. Contrib. Plasma Phys. 53 129 (2013)
  45. Batani D et al. Phys. Rev. E 68 067403 (2003)
  46. Zeng X et al. Appl. Phys. A 80 237 (2005)
  47. Vailionis A et al. Nature Commun. 2 445 (2011)
  48. Korte F et al. Appl. Phys. A 77 229 (2003)
  49. Joglekar A P et al. Proc. Natl. Acad. Sci. USA 101 5856 (2004)
  50. Shinoda M, Gattass R R, Mazur E J. Appl. Phys. 105 053102 (2009)
  51. Ionin A A et al. Appl. Phys. A 117 1757 (2014)
  52. Ionin A A i dr. Pis’ma ZhETF 101 336 (2015); Ionin A A et al. JETP Lett. 101 308 (2015)
  53. Ionin A A et al. Laser Phys. Lett. 12 075301 (2015)
  54. Danilov P A et al. Zh. Eksp. Teor. Fiz. 147 1098 (2015); Danilov P A et al. JETP 120 946 (2015)
  55. Zhakhovskii V V, Inogamov N A, Nishihara K Pis’ma ZhETF 87 491 (2008); Zhakhovskii V V, Inogamov N A, Nishihara K JETP Lett. 87 423 (2008)
  56. Ionin A A i dr. Pis’ma ZhETF 94 289 (2011); Ionin A A et al. JETP Lett. 94 266 (2011)
  57. Ashitkov S I i dr. Pis’ma ZhETF 95 192 (2012); Ashitkov S I et al. JETP Lett. 95 176 (2012)
  58. Ionin A A i dr. Pis’ma ZhETF 96 413 (2012); Ionin A A et al. JETP Lett. 96 375 (2012)
  59. Ionin A A i dr. Zh. Eksp. Teor. Fiz. 143 403 (2013); Ionin A A et al. JETP 116 347 (2013)
  60. Ionin A A et al. Laser Phys. Lett. 13 025603 (2015)
  61. Wu C, Zhigilei L V Appl. Phys. A 114 11 (2014)
  62. Ivanov D S et al. Appl. Phys. A 117 2133 (2014)
  63. Isakov V A, Kanavin A P, Uryupin S A Kvantovaya Elektron. 36 928 (2006); Isakov V A, Kanavin A P, Uryupin S A Quantum Electron. 36 928 (2006)
  64. Lin Z, Zhigilei L V, Celli V Phys. Rev. B 77 075133 (2008)
  65. Petrov Yu V, Inogamov N A, Migdal K P Pis’ma ZhETF 97 24 (2013); Petrov Yu V, Inogamov N A, Migdal K P JETP Lett. 97 20 (2013)
  66. Tom H W K, Aumiller G D, Brito-Cruz C H Phys. Rev. Lett. 60 1438 (1988)
  67. Saeta P et al. Phys. Rev. Lett. 67 1023 (1991)
  68. Sokolowski-Tinten K et al. Appl. Phys. A 53 227 (1991)
  69. Sokolowski-Tinten K et al. Nature 422 287 (2003)
  70. Bulgakova N M et al. Phys. Rev. B 69 054102 (2004)
  71. Rethfeld B et al. Appl. Phys. A 101 19 (2010)
  72. Shcheblanov N S, Itina T E Appl. Phys. A 110 579 (2013)
  73. Lenner M et al. Phys. Rev. B 79 184105 (2009)
  74. Dachraoui H, Husinsky W Phys. Rev. Lett. 97 107601 (2006)
  75. Huang M et al. Phys. Rev. B 79 125436 (2009)
  76. Hebeisen C T et al. Phys. Rev. B 78 081403(R) (2008)
  77. Zhao X, Shin Y C J. Phys. D 46 335501 (2013)
  78. Roeterdink W G et al. Appl. Phys. Lett. 82 4190 (2003)
  79. Stoian R et al. Appl. Phys. Lett. 85 694 (2004)
  80. Ionin A A i dr. Izv. RAN Cer. Fiz. 80 495 (2016); Ionin A A et al. Bull. Russ. Acad. Sci. Phys. 80 450 (2016)
  81. Hada M et al. Nature Commun. 5 3863 (2014)
  82. Kudryashov S I, Emel’yanov V I Pis’ma ZhETF 73 751 (2001); Kudryashov S I, Emel’yanov V I JETP Lett. 73 666 (2001)
  83. Gamaly E et al. Phys. Plasmas 9 949 (2002)
  84. Itina T E et al. Thin Solid Films 453-454 513 (2004)
  85. Inogamov N A et al. Contrib. Plasma Phys. 53 796 (2013)
  86. Stegailov V, Zhilyaev P Contrib. Plasma Phys. 55 164 (2015)
  87. Starikov S V, Pisarev V V J. Appl. Phys. 117 135901 (2015)
  88. Ashcroft N W, Mermin N D Solid State Physics (New York: Holt, Rinehart and Winston, 1976); Per. na russk. yaz., Ashkroft N, Mermin N Fizika Tverdogo Tela (M.: Mir, 1979)
  89. Artyukov I A i dr. Pis’ma ZhETF 99 54 (2014); Artyukov I A et al. JETP Lett. 99 51 (2014)
  90. Choi T Y, Grigoropoulos C P J. Appl. Phys. 92 4918 (2002)
  91. Bogatyrev I B et al. J. Appl. Phys. 110 103106 (2011)
  92. Girardeau-Montaut J P, Girardeau-Montaut C Phys. Rev. B 51 13560 (1995)
  93. Zayarnyi D A i dr. Pis’ma ZhETF 103 846 (2016); Sayarny D A et al. JETP Lett. 103 752 (2016)
  94. Zayarny D A et al. Laser Phys. Lett. 13 076101 (2016)
  95. Bashir S, Rafique M S, Husinsky W Nucl. Instrum. Meth. Phys. Res. B 275 1 (2012)
  96. Ionin A A et al. Laser Phys. Lett. 10 056004 (2013)
  97. Nathala C S R et al. Opt. Exp. 23 5915 (2015)
  98. Kudryashov S I et al. Opt. Lett. 40 4967 (2015)
  99. Ionin A A i dr. Pis’ma ZhETF 101 382 (2015); Ionin A A et al. JETP Lett. 101 350 (2015)
  100. Anisimov S I, Prokhorov A M, Fortov V E Usp. Fiz. Nauk 142 395 (1984); Anisimov S I, Prokhorov A M, Fortov V E Sov. Phys. Usp. 27 181 (1984)
  101. Kanel’ G I i dr. Udarno-volnovye Yavleniya v Kondensirovannykh Sredakh (M.: Yanus-K, 1996)
  102. Krasyuk I K i dr. Kvantovaya Elektron. 33 593 (2003); Krasyuk I K et al. Quantum Electron. 33 593 (2003)
  103. Kanel’ G I, Fortov V E, Razorenov S V Usp. Fiz. Nauk 177 809 (2007); Kanel G I, Fortov V E, Razorenov S V Phys. Usp. 50 771 (2007)
  104. Ionin A A i dr. Zh. Eksp. Teor. Fiz. 148 846 (2015); Ionin A A et al. JETP 148 846 (2015)
  105. Leveugle E, Ivanov D S, Zhigilei L V Appl. Phys. A 79 1643 (2004)
  106. Zhigilei L V, Lin Z, Ivanov D S J. Phys. Chem. C 113 11892 (2009)
  107. Demaske B J et al. Phys. Rev. B 82 064113 (2010)
  108. Lorazo P, Lewis L J, Meunier M Phys. Rev. B 73 134108 (2006)
  109. Sonntag S et al. Appl. Phys. A 104 559 (2011)
  110. Paltauf G, Schmidt-Kloiber H Appl. Phys. A 62 303 (1996)
  111. Kim D, Ye M, Grigoropoulos C P Appl. Phys. A 67 169 (1998)
  112. Kudryashov S I et al. J. Appl. Phys. 100 056103 (2006)
  113. Kudryashov S I, Allen S D Appl. Phys. A 79 1737 (2004)
  114. Lang F et al. Appl. Phys. Lett. 85 2759 (2004)
  115. Kudryashov S I, Allen S D J. Appl. Phys. 95 5820 (2004)
  116. Kudryashov S I, Allen S D J. Appl. Phys. 93 4306 (2003)
  117. Kudryashov S I, Allen S D J. Appl. Phys. 100 104908 (2006)
  118. Kudryashov S I, Lyon K, Allen S D Phys. Rev. E 73 055301(R) (2006)
  119. Kudryashov S I, Lyon K, Allen S D Phys. Rev. E 75 036313 (2007)
  120. Skripov V P i dr. Teplofizicheskie Svoistva Zhidkostei v Metastabil’nom Sostoyanii (M.: Atomizdat, 1980); Per. na angl. yaz., Skripov V P et al. Thermophysical Properties Of Liquids In The Metastable (Superheated) State (New York: Gordon and Breach Sci. Publ., 1988)
  121. Ionin A A et al. Appl. Phys. B 111 419 (2013)
  122. Ionin A A i dr. Pis’ma ZhETF 94 816 (2011); Ionin A A et al. JETP Lett. 94 753 (2011)
  123. Kudryashov S I, Ionin A A Int. J. Heat Mass Transfer 99 383 (2016)
  124. Ashitkov S I i dr. Pis’ma ZhETF 103 611 (2016); Ashitkov S I et al. JETP Lett. 103 544 (2016)
  125. Oboňa J V et al. Appl. Surf. Sci. 303 118 (2014)
  126. Kuchmizhak A et al. ACS Appl. Mater. Interfaces 8 24946 (2016)
  127. Korte F et al. Appl. Phys. A 77 229 (2003)
  128. Koch J et al. Appl. Phys. A 81 325 (2005)
  129. Nakata Y, Miyanaga N, Okada T Appl. Surf. Sci. 253 6555 (2007)
  130. Reininghaus M et al. Opt. Exp. 31 32176 (2013)
  131. Danilov P A i dr. Kvantovaya Elektron. 44 540 (2014); Danilov P A et al. Quantum Electron. 44 540 (2014)
  132. Danilov P A et al. Appl. Phys. A 117 981 (2014)
  133. Kuchmizhak A et al. Sci. Rep. 6 19410 (2016)
  134. Kuchmizhak A et al. Nanoscale 8 12352 (2016)
  135. Zhang N et al. Phys. Rev. Lett. 99 167602 (2007)
  136. Leguay P M et al. Phys. Rev. Lett. 111 245004 (2013)
  137. Cho B I et al. Phys. Rev. Lett. 106 167601 (2011)
  138. Fletcher L B et al. Nature Photon. 9 274 (2015)
  139. Mazhukin V I i dr. Kvantovaya Elektronika 44 283 (2014); Mazhukin V I et al. Quantum Electron. 44 283 (2014)
  140. Gubko M A i dr. Pis’ma ZhETF 97 687 (2013); Gubko M A et al. JETP Lett. 97 599 (2013)
  141. Gubko M A et al. Laser Phys. Lett. 11 065301 (2014)
  142. Ionin A A i dr. Izv. RAN Ser. Fiz. 80 1080 (2016); Ionin A A et al. Bull. Russ. Acad. Sci. Phys. 80 991 (2016)
  143. Kudryashov S I et al. AIP Conf. Proc. 1464 244 (2012)
  144. Ageev E I i dr. Pis’ma ZhETF 102 785 (2015); Ageev E I et al. JETP Lett. 102 693 (2015)
  145. Ageev E I et al. Appl. Phys. Lett. 108 084106 (2016)
  146. Ashitkov S I i dr. Pis’ma ZhETF 101 294 (2015); Ashitkov S I et al. JETP Lett. 101 276 (2015)
  147. Gusev V E, Karabutov A A Laser Optoacoustics (New York: AIP, 1993)
  148. Zel’dovich Ya B, Raizer Yu P Fizika Udarnykh Voln i Vysokotemperaturnykh Gazodinamicheskikh Yavlenii (M.: Nauka, 1966); Per. na angl. yaz., Zel’dovich Ya B, Raizer Yu P Physics Of Shock Waves And High-Temperature Hydrodynamic Phenomena (Mineola, NY: Dover Publ., 2002)
  149. Ashitkov S I i dr. Pis’ma ZhETF 92 568 (2010); Ashitkov S I et al. JETP Lett. 92 516 (2010)
  150. Inogamov N A i dr. Pis’ma ZhETF 93 245 (2011); Inogamov N A et al. JETP Lett. 93 226 (2011)
  151. Lee D, Kannatey-Asibu E (Jr.) J. Laser Appl. 23 022004 (2011)
  152. Ye Y, Feng Y, Lian Z, Hua Y Appl. Surf. Sci. 309 240 (2014)
  153. Ye Y, Feng Y, Lian Z, Hua Y Opt. Laser Eng. 67 74 (2015)
  154. Wu B, Tao S, Lei S Appl. Surf. Sci. 256 4376 (2010)
  155. Ashitkov S I i dr. Pis’ma ZhETF 98 439 (2013); Ashitkov S I et al. JETP Lett. 98 384 (2013)
  156. Sano T et al. Appl. Surf. Sci. 247 571 (2005)
  157. Yang J et al. Phys. Rev. B 76 165430 (2007)

© 1918–2024 Uspekhi Fizicheskikh Nauk
Email: ufn@ufn.ru Editorial office contacts About the journal Terms and conditions