Issues

 / 

2009

 / 

January

  

Reviews of topical problems


Structures and properties of hard and superhard nanocomposite coatings

 a,  a,  b,  b
a Kurdyumov Institute for Metal Physics, National Academy of Sciences of Ukraine, Vernadsky blvd. 36, Kyiv, 03680, Ukraine
b V.N. Karazin Khar'kov National University, pl. Svobody 4, Khar'kov, 61077, Ukraine

Various approaches to creating multicomponent nanocomposite coatings of high and superhigh hardness (from $\simeq$ 30 to 100 — 120 GPa) are reviewed with particular emphasis placed on mechanisms underlying the increase in hardness in thin ≤ 10 μm) coatings. The deposition technologies considered include magnetron sputtering, ion beam-assisted and vacuum arc depositions. A classification of hard and superhard coatings with high thermal stability is given. Possible applications of such nanostructured coatings are discussed and prospects for the field are outlined.

Fulltext pdf (1.6 MB)
Fulltext is also available at DOI: 10.3367/UFNe.0179.200901b.0035
PACS: 61.46.−w, 62.20.Qp, 62.25.−g (all)
DOI: 10.3367/UFNe.0179.200901b.0035
URL: https://ufn.ru/en/articles/2009/1/b/
000266708800002
2-s2.0-67849118716
2009PhyU...52...29P
Citation: Pogrebnjak A D, Shpak A P, Azarenkov N A, Beresnev V M "Structures and properties of hard and superhard nanocomposite coatings" Phys. Usp. 52 29–54 (2009)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Оригинал: Погребняк А Д, Шпак А П, Азаренков Н А, Береснев В М «Структура и свойства твёрдых и сверхтвёрдых нанокомпозитных покрытий» УФН 179 35–64 (2009); DOI: 10.3367/UFNr.0179.200901b.0035

References (205) ↓ Cited by (176) Similar articles (20)

  1. Gleiter H Acta Mater. 48 1 (2000)
  2. Skorokhod V V, Ragulya A V, a sb. v Sb. Progresivni Materiali I Tekhnologii Vol. 2 (K.: Akademperiodika, 2003) p. 7
  3. Andrievskii R A, Glezer A M Fiz. Met. Metalloved. 88 (1) 50 (1999); Andrievski R A, Glezer A M Phys. Met. Metallogr. 88 45 (1999)
  4. Cavalerto A, Dc Hosson J Th (Eds) Nanostructured Coatings (New York: Springer, 2006)
  5. Mayrhofer P H et al. Prog. Mater. Sci. 51 1032 (2006)
  6. Andrievskii R A Usp. Khimii 74 1163 (2005); Andrievski R A Russ. Chem. Rev. 74 1061 (2005)
  7. Levashov E A, Shtanskii D V Usp. Khimii 76 501 (2007); Levashov E A, Shtansky D V Russ. Chem. Rev. 76 463 (2007)
  8. Voevodin A A et al. (Eds) Nanostructured Thin Films And Nanodispersion Strengthened Coatings (Dordrecht: Kluwer Acad. Publ., 2004)
  9. Reshetnyak E N, Strel’nitskii V E "Sintez nanostrukturnykh plenok: dostizheniya i perspektivy" Khar’kovskaya Nanotekhnologicheskaya Assambleya. Sbornik Dokladov Vol. 1 (Pod red. I M Neklyudova, A P Shpaka, V M Shulaeva) (Khar’kov, 2007) p. 6
  10. Shtanskii D V i dr. Fiz. Tverd. Tela 47 242 (2005); Shtansky D V et al. Phys. Solid State 47 252 (2005)
  11. Kiryukhantsev-Korneev F V i dr. Fiz. Met. Metalloved. 97 (3) 96 (2004); Kiryukhantsev-Korneev F V et al. Phys. Met. Metallogr. 97 314 (2004)
  12. Shtansky D V et al. J. Mater. Synth. Process 6 61 (1998)
  13. Beresnev V M i dr. Fizicheskaya Inzheneriya Poverkhnosti 5 (1/2) 4 (2007)
  14. Beresnev V M i dr. Visnik Kharkivs’kogo Universitetu Yadra, chastinki, polya (2(34)) 93 (2007)
  15. Pogrebnyak A D, Tyurin Yu N Usp. Fiz. Nauk 175 515 (2005); Pogrebnyak A D, Tyurin Yu N Phys. Usp. 48 487 (2005)
  16. Boiko V I, Valyaev A N, Pogrebnyak A D Usp. Fiz. Nauk 169 1243 (1999); Boiko V I, Valyaev A N, Pogrebnyak A D Phys. Usp. 42 1139 (1999)
  17. Kadyrzhanov K K i dr. Ionno-luchevaya i Ionno-plazmennaya Modifikatsiya Materialov (M.: Izd-vo MGU, 2005)
  18. Azarenkov N A, Beresnev V M, Pogrebnyak A D Struktura i Svoistva Zashchitnykh Pokrytii i Modifitsirovannykh Sloev Materialov (Khar’kov: Khar’kovskii natsional’nyi universitet, 2007)
  19. Veprek S et al. Thin Solid Films 476 1 (2005)
  20. Gleiter H Prog. Mater. Sci. 33 223 (1989)
  21. Yip S Nature 391 532 (1998)
  22. Musil J, Vlček J Mater. Chem. Phys. 54 116 (1998)
  23. Vepřek S J. Vac. Sci. Technol. A 17 2401 (1999)
  24. Musil J Surf. Coat. Technol. 125 322 (2000)
  25. Voevodin A A, Zabinski J S Thin Solid Films 370 223 (2000)
  26. Brazhkin V V et al. Philos. Mag. A 82 (2) 231 (2002)
  27. Musil J et al. Key Eng. Mater. 230 - 232 613 (2002)
  28. Musil J Acta Metallurg. Sinica 18 (3) 433 (2005)
  29. Zhang S et al. Surf. Coat. Technol. 198 2 (2005)
  30. Musil J In Nanostructured Hard Coatings (New York: Kluwer Acad./Plenum Publ. (2005), Ch. 10
  31. Tsui T Y et al. Mater. Res. Soc. Symp. Proc. 383 447 (1995)
  32. Musil J et al. Surf. Coat. Technol. 154 304 (2002)
  33. Musil J, Jirout M in 5th Asian-European Intern. Conf. on Plasma Surface Engineering, Sept. 12 - 16, 2005 Qingdao City, China; Musil J, Jirout M Surf. Coat. Technol. 201 5148 (2007)
  34. Zeman H, Musil J, Zeman P J. Vacuum Sci. Technol. A 22 646 (2004)
  35. Musil J et al. Thin Solid Films 478 238 (2005)
  36. Musil J, Dohnal P, Zeman P J. Vacuum Sci. Technol. B 23 1568 (2005)
  37. Musil J, Zeman P Solid State Phenomena 127 31 (2007)
  38. Musil J "Properties of hard nanocomposite thin films" In Nanocomposite Thin Films And Coatings: Processing, Properties And Performance (Eds S Zhang, A Nasar) (London: Imperial College Press, 2007), Ch. 5
  39. Linder C et al. Sens. Actuators A 61 387 (1997)
  40. Lee Y-J et al. Thin Solid Films 320 141 (1998)
  41. Nah J W, Hwang S K, Lee C M Mater. Chem. Phys. 62 115 (2000)
  42. Nah J W et al. Surf. Coat. Technol. 123 1 (2000)
  43. Olowolafe J O et al. Thin Solid Films 365 19 (2000)
  44. Münz W-D J. Vac. Sci. Technol. A 4 2717 (1986)
  45. Donohue L A et al. Surf. Coat. Technol. 94 - 95 226 (1997)
  46. Wadsworth I et al. Surf. Coat. Technol. 94 - 95 315 (1997)
  47. Veprek S, Haussmann M, Reiprich S Mater. Res. Soc. Symp. Proc. 400 261 (1996)
  48. Holleck H J. Vac. Sci. Technol. A 4 2661 (1986)
  49. Berg C et al. In Handbook Of Ceramic Hard Materials (Ed. R Riedel) (Weinheim: Wiley-VCH, 2000) p. 968, Table I
  50. Korotaev A D i dr. Fizika Khimiya Obrabotki Materialov (1) 22 (2004)
  51. Korotaev A D, Tyumentsev A N, Litovchenko I Yu Phys. Met. Metallogr. 90 (Suppl. 1) 36 (2000)
  52. Tyumentsev A N et al. in Proc. of 1st Intern. Congress on Radiation Physics, High-Current Electronics, and Materials Modification Vol. 3 (Tomsk, 2000) p. 442
  53. Morris D G In Material Science Foundation (Translation Technical Publication LVD Switzerland, Germany, UK, USA) Vol. 2 (1998) p. 1
  54. Musil J Surf. Coat. Technol. 125 322 (2000)
  55. Zeman P et al. Mater. Sci. Eng. A 289 189 (2000)
  56. Vlček J et al. Surf. Coat. Technol. 76 - 77 274 (1995)
  57. Musil J, Matous J, Valvoda V Vacuum 46 203 (1995)
  58. Musil J, Vlček J "Physical and mechanical properties of hard nanocomposite films prepared by magnetron sputtering" in Proc. of 1st Intern. Congress on Radiation Physics, High-Current Electronics and Materials Modification Vol. 3 (Tomsk, 2000) p. 393
  59. Vepřek S et al. Surf. Coat. Technol. 108 - 109 138 (1998)
  60. Vepřek S et al. J. Vac. Sci. Technol. A 21 532 (2003)
  61. Vepřek S J. Vac. Sci. Technol. A 17 2401 (1999)
  62. Riedel R (Ed.) Handbook Of Ceramic Hard Materials (Weinheim: Wiley-VCH, 2000)
  63. Rogl P, Schuster J C Phase Diagrams Of Ternary Boron Nitride And Silicon Nitride Systems (Materials Park, OH: ASM Intern., 1992)
  64. Blanquet E et al. in Chemical Vapor Deposition: Proc. of the 14th Intern. Conf. and EUROCVD-11, Paris September 5 - 9, 1997 (Electrochem. Soc. Proc., Vol. 97 - 25, Eds M D Allendorf, C Bernard) (Pennington, NJ: The Electrochem. Soc., 1997) p. 23
  65. Hirai T, Hayashi S J. Mater. Sci. 17 1320 (1982); Hayashi S et al. J. Mater. Sci. 17 3336 (1982); Hirai T, Hayashi S J. Mater. Sci. 18 2401 (1983)
  66. Mayrhofer P H et al. Appl. Phys. Lett. 86 131909 (2005)
  67. Mayrhofer P H In Nanostructured Thin Films And Nanodispersion Strengthened Coatings (Eds A A Voevodin et al.) (Dordrecht: Kluwer Acad. Publ., 2004) p. 57
  68. Vepřek S, Reiprich S Thin Solid Films 268 64 (1995)
  69. Vepřek S, Haussmann M, Reiprich S J. Vac. Sci. Technol. A 14 46 (1996)
  70. Knotek O in Mater. Res. Soc., Fall Meeting/ICEM, Boston, MA, USA, Dec. 2 - 6, 1996, unpublished and private communication
  71. Knotek O et al. Mater. Sci. Eng. A 209 394 (1996)
  72. Voevodin A A, Zabinski J S Thin Solid Films 370 223 (2000)
  73. Hauert R, Patscheider J Adv. Eng. Mater. 2 247 (2000)
  74. Li D et al. Appl. Phys. Lett. 67 203 (1995)
  75. Li D et al. Appl. Phys. Lett. 68 1211 (1996)
  76. Chung Y W Surf. Rev. Lett. 3 1597 (1996)
  77. Veprek S et al. Thin Solid Films 476 1 (2005), see p. 27
  78. Li S Z, Shi Y, Peng H Plasma Chem. Plasma Process. 12 287 (1992)
  79. Vepřek S, Reiprich S, Li S Appl. Phys. Lett. 66 2640 (1995)
  80. Niederhofer A et al. Surf. Coat. Technol. 146 - 147 183 (2001)
  81. Veprek A et al. Mater. Res. Soc. Symp. Proc. 581 321 (2000)
  82. Veprek S et al. Surf. Coat. Technol. 133 - 134 152 (2000)
  83. Li S Z et al., unpublished
  84. Lawn B Fracture Of Brittle Solids 2nd ed. (Cambridge: Cambridge Univ. Press, 1993) p. 173
  85. Andrievski R A J. Solid State Chem. 133 249 (1997)
  86. Hammer P et al. Surf. Coat. Technol. 68 - 69 194 (1994)
  87. Mitterer C et al. Surf. Coat. Technol. 120 - 121 405 (1999)
  88. Männling D-H et al. Surf. Coat. Technol. 146 - 147 263 (2001)
  89. Karvánková P et al. Surf. Coat. Technol. 146 - 147 280 (2001)
  90. Karvankova P et al. Surf. Coat. Technol. 163 - 164 149 (2003)
  91. Hultman L Vacuum 57 1 (2000)
  92. Musil J, Baroch P, Zeman P In Plasma Surface Engineering Research And Its Practical Applications (Ed. R Wei) (Kerala: Signpost Publ., 2007), Ch. 1
  93. Zeman P et al. Mater. Sci. Eng. A 289 189 (2000)
  94. Vepřek S et al. Surf. Coat. Technol. 86 - 87 394 (1996)
  95. Hertzberg R W Deformation And Fracture Mechanics Of Engineering Materials 3rd ed. (New York: Wiley, 1989)
  96. Veprek S, Veprek-Heijman M G J In Nanostructured Coatings (Eds A Cavaleiro, J Th M De Hosson) (New York: Springer, 2006)
  97. Vaz F PhD Thesis (Minho, Portugal: Univ. of Minho, 2000)
  98. Veprek S et al. Mater. Sci. Eng. A 448 366 (2007)
  99. Procházka J et al. Mater. Sci. Eng. 384 102 (2004)
  100. Holubar P, Jilek M, Sima M Surf. Coat. Technol. 133 - 134 145 (2000)
  101. Männling D-H Diploma Work (Munich: Technical Univ. of Munich, 1999)
  102. Patscheider J MRS Bull. 28 (3) 180 (2003)
  103. Meng W J et al. J. Mater. Res. 17 2628 (2002)
  104. Zhang X D et al. Surf. Coat. Technol. 177 - 178 325 (2004)
  105. Lee E-A, Kim K H Thin Solid Films 420 - 421 371 (2002)
  106. Vaz F et al. Surf. Coat. Tech. 133 - 134 307 (2000)
  107. Veprek S et al. Surf. Coat. Technol. 200 3876 (2006)
  108. Veprek S et al. Thin Solid Films 436 220 (2003)
  109. Doener M F, Nix W D J. Mater. Res. 1 601 (1986)
  110. Pharr G M Mater. Sci. Eng. A 253 151 (1998)
  111. Bull S J, Page T F, Yoffe E H Philos. Mag. Lett. 59 281 (1989)
  112. Fischer-Cripps A C Nanoindentation (New York: Springer, 2002)
  113. Bull S J J. Vac. Sci. Technol. A 19 1404 (2001)
  114. Bull S J Thin Solid Films 398 - 399 291 (2001)
  115. Hu X et al. J. Vac. Sci. Technol. A 20 1921 (2002)
  116. Vaz F et al. Surf. Coat. Technol. 146 - 147 274 (2001)
  117. Winters H F, Sigmund P J. Appl. Phys. 45 4760 (1974)
  118. Winters H F In Plasma Chemistry Vol. 3 (Eds S Vepřek, M Venugopalan) (Berlin: Springer Verlag, 1980) p. 69
  119. Musil J et al. Mater. Sci. Eng. A 340 281 (2003)
  120. Veprek S et al. Mater. Sci. Eng. A 340 292 (2003)
  121. Tabor D The Hardness Of Metals (Oxford: Clarendon Press, 1951)
  122. Argon A S, Veprek S Mater. Res. Soc. Symp. Proc. 697 3 (2002)
  123. Argon A S, Demkowicz M J, Veprek S AIP Conf. Proc. 712 3 (2004)
  124. Rose J H et al. Phys. Rev. B 29 2963 (1984)
  125. Smith J R et al. In Chemistry And Physics Of Fracture (Eds R M Latanision, R H Jones) (Dordrecht: Kluwer Acad. Publ., 1987)
  126. Murarka S P J. Vac. Sci. Technol. 17 775 (1980)
  127. Suzuki T et al. J. Mater. Sci. 35 4193 (2000)
  128. Bull S J, Hainsworth S V Surf. Coat. Technol. 122 225 (1999)
  129. Héau C, Terrat J P Surf. Coat. Technol. 108 - 109 332 (1998)
  130. Schmalzried H Chemical Kinetics Of Solids (Weinheim: VCH, 1995)
  131. Porter D A, Easterling K E Phase Transformations In Metals And Alloys 2nd ed. (Cheltenham: Stanley Thornes Publ., 2001)
  132. Vepřek S et al. Surf. Coat. Technol. 108 - 109 138 (1998)
  133. Procházka Th J "Superharte TiN/Si3N4 Nanokomposite durch reaktive Magnetronzerstübung kombiniert mit chemischer Gasphaseabscheidung" PhD Thesis (Munich: Technical Univ., 2003); Procházka Th J http://tumb1.biblio.tu-muenchen.de/publ/diss/ch/2003/prochazka.pdf
  134. Karvánková P "Superhard nc-TiN/a-BN/a-TiB2 and nc-MnN/a-metal nanocrystalline composite coatings" PhD Thesis (Munich: Technical Univ., 2003); Karvánková P http://tumb1.biblio.tu-muenchen.de/publ/diss/ch/2003/karvankova.pdf
  135. Maennlig H-D PhD Thesis (Munich: Technical Univ., 2003); Maennlig H-D http://tumb1.biblio.tu-muenchen.de/publ/diss/ch/2003/maennling.pdf
  136. Karvánková P et al. Surf. Coat. Technol., in press
  137. Karvánková P et al. Thin Solid Films 467 133 (2004)
  138. Chase M W et al. "JANAF Thermochemical Tables" J. Phys. Chem. Ref. Data 14 (Suppl. 1) (1985), 3 rd ed.
  139. Veprek S et al. Mater. Sci. Eng. A 366 202 (2004)
  140. Gahn J W Acta Metall. 11 1275 (1963)
  141. Diserens M, Patscheider J, Lévy F Surf. Coat. Technol. 120 - 121 158 (1999)
  142. Diserens M, Patscheider J, Lévy F Surf. Coat. Technol. 108 - 109 241 (1998)
  143. Patscheider J, Zehnder T, Diserens M Surf. Coat. Technol. 146 - 147 201 (2001)
  144. Hauert R et al. Adv. Mater. 11 175 (1999)
  145. Mayrhofer P H et al. Appl. Phys. Lett. 83 2049 (2003)
  146. Münz W-D J. Vac. Sci. Technol. A 4 2717 (1986); Veprek S et al. Thin Solid Films 476 1 (2005)
  147. Münz W-D Werkst. Korros. 41 753 (1990)
  148. Münz W-D et al. In Proc. Of Industrial Tooling 2001, September 5 - 6, Southampton (Southampton: Centaur Publ., 2001) p. 1
  149. Tanaka Y et al. Surf. Coat. Technol. 146 - 147 215 (2001)
  150. Bunshah R F (Ed.) Handbook Of Deposition Technologies For Films And Coatings 2nd ed. (Park Ridge, NJ: Noyes Publ., 1994)
  151. Karvánková P et al. The Solid Films 467 133 (2004)
  152. Li Z et al. Jpn. J. Appl. Phys. 42 7510 (2003)
  153. Watanabe H et al. Surf. Coat. Technol. 169 - 170 452 (2003)
  154. Nose M et al. Surf. Coat. Technol. 174 - 175 261 (2003)
  155. Zhang C H et al. J. Appl. Phys. 95 1460 (2004)
  156. Nose M et al. J. Vac. Sci. Technol. A 20 823 (2002)
  157. Gleiter H Nanostruct. Mater. 6 3 (1995)
  158. Siegel R W, Fougere G E Nanostruct. Mater. 6 205 (1995)
  159. Yip S Nature 391 532 (1998)
  160. Carsley J E et al. Nanostruct. Mater. 5 441 (1995)
  161. Weertman J R et al. MRS Bull. 24 (2) 44 (1999)
  162. Gleiter H Prog. Mater. Sci. 33 223 (1989)
  163. Argon A S In Physical Metallurgy Vol. 3 (Eds R W Cahn, P Haasen) 4th ed. (Amsterdam: North-Holland, 1996) p. 1878
  164. Argon A S In Materials Science And Technology: A Comprehensive Treatment (Eds R W Cahn, P Haasen, E J Kramer) (Weinheim: VCH, 1993) p. 461
  165. Demkowicz M J, Argon A S Phys. Rev. Lett. 93 025505 (2004)
  166. Gouldstone A, Van Vliet K J, Suresh S Nature 411 656 (2001)
  167. Van Vliet K J et al. Phys. Rev. B 67 104105 (2003)
  168. Jacobs K et al. Science 293 1803 (2001)
  169. Argon A S, Hori Y, Orowan E J. Am. Ceram. Soc. 43 86 (1960)
  170. Veprek S et al. Mater. Res. Soc. Symp. Proc. 750 9 (2003)
  171. Karvánková P et al. Surf. Coat. Technol. 200 2978 (2006)
  172. Kiryukhantsev-Korneev Ph V et al. Surf. Coat. Technol. 201 6143 (2007)
  173. Vlček J et al. J. Vac. Sci. Technol. A 23 1513 (2005)
  174. Shtansky D V et al. J. Mater. Synth. Procces. 6 61 (1998)
  175. Mayrhofer P M, Clemens H, Mitterer S Z. Metall. 96 5 (2005)
  176. Jiang N et al. Mater. Sci. Eng. B 106 163 (2004)
  177. Lavrent’ev V I, Pogrebnyak A D, Shandrik R Pis’ma ZhETF 65 86 (1997); Lavrent’ev V I, Pogrebnyak A D, Sandrik R JETP Lett. 65 91 (1997)
  178. Pogrebnyak A D i dr. Pis’ma ZhTF 27 (14) 88 (2001); Pogrebnyak A D et al. Tech. Phys. Lett. 27 615 (2001)
  179. Lavrent’ev V I, Pogrebnyak A D, Shandrik R Pis’ma ZhETF 65 618 (1997); Lavrent’yev V I, Pogrebnyak A D, Sandrik R JETP Lett. 65 (8) 651 (1997)
  180. Pogrebnjak A D et al. Phys. Lett. A 241 357 (1998)
  181. Pogrebnjak A D, Tolopa A M Nucl. Instrum. Meth. Phys. Res. B 52 25 (1990)
  182. Vasil’ev M A, Prokopenko G I, Filatova V S Uspekhi Fiziki Metallov (5) 345 (2004)
  183. Shevchenko S V, Stetsenko N N Uspekhi Fiziki Metallov (4) 219 (2004)
  184. Larikov L N Metallofizika Noveishie Tekhnologii 17 (9) 56 (1994)
  185. Pozdnyakov V A Fiz. Met. Metalloved. 96 (1) 114 (2003); Pozdnyakov V A Phys. Met. Metallogr. 96 105 (2003)
  186. Larikov L N Metallofizika Noveishie Tekhnologii 19 (1) 19 (2003)
  187. Gautier C, Machet J Thin Solid Films 295 43 (1997)
  188. Strel’nitskii V E, Aksenov I I Plenki Almazopodobnogo Ugleroda (Khar’kov: NNTs KhFTI, 2006)
  189. Firstov S A v Sb. Progresivni Materiali I Tekhnologii Vol. 2 (Kiev: Akademperiodika, 2003) p. 610
  190. Goncharenko I M i dr. "Formirovanie nanokristallicheskikh Ti-Cu-N-pokrytii v plazme dugovykh razryadov nizkogo davleniya" v sb. Doklady 7 Mezhdunarod. konf. "Vakuumnye nanotekhnologii i oborudovanie" (Khar’kov: NNTs KhFTI, IPP "Kontrast", 2006) p. 221
  191. Kunchenko V V i dr. Voprosy Atomnoi Nauki Tekhniki Fizika radiatsionnykh povrezhdenii i radiatsionnoe materialovedenie (4) 185 (2006)
  192. David A et al. Mater. Sci. Forum 255 - 257 205 (1997)
  193. Krause-Rehberg R, Leipner H S Positron Annihilation In Semiconductors: Defects Studies (Berlin: Springer, 1999)
  194. Renk T J et al. Proc. IEEE 92 1057 (2004)
  195. Zeman P, Musil J, Daniel R Surf. Coat. Technol. 200 4091 (2006)
  196. Musil J et al. Surf. Coat. Technol. 200 3886 (2006)
  197. Zhang R F, Sheng S H, Veprek S Appl. Rhys. Lett. 91 031906 (2007)
  198. Zhang R F, Veprek S Phys. Rev. B 76 174105 (2007)
  199. Veprek S, Argon S, Zhang RF Philos. Mag. Lett. 87 (12) 955 (2007)
  200. Mirkin Ch A MRS Bull. 25 (1) 43 (2000)
  201. Muster D et al. MRS Bull. 25 (1) 25 (2000)
  202. Murray C B et al. MRS Bull. 26 (12) 985 (2001)
  203. Lee G R et al. Surf. Coat. Technol. 201 5207 (2007)
  204. Ragulya A V, Skorokhod V V Konsolidirovannye Nanostrukturnye Materialy (Kiev: Naukova Dumka, 2007)
  205. Beresnev V M i dr. Uspekhi Fiziki Metallov 8 (3) 171 (2007)

© 1918–2024 Uspekhi Fizicheskikh Nauk
Email: ufn@ufn.ru Editorial office contacts About the journal Terms and conditions