RSS feeds
РусскийEnglish
Issue 10, 2026
Volume year page
Issues Authors PACS Subscription For authors

Issues

 / 

2007

 / 

May

←  →

Reviews of topical problems


Magnetron plasma and nanotechnology

 a,  b,  c
a Institute for High Temperatures, Joint Institute for High Temperatures, Russian Academy of Sciences, ul. Izhorskaya 13/19, Moscow, 127412, Russian Federation
b Joint Institute for High Temperatures, Russian Academy of Sciences, ul. Izhorskaya 13/19, Moscow, 127412, Russian Federation
c Institute of Physics, University of Greifswald, Greifswald, Germany

Magnetron plasma processes involving metal atoms and clusters are reviewed. The formation of metal atoms near the cathode and their nucleation in а buffer gas flow are discussed. The flow of а buffer gas with metal clusters through а magnetron chamber disturbs the equilibrium between the buffer gas flow and clusters near the exit orifice and is accompanied by cluster attachment to the chamber walls. Cluster charging far off the cathode, the disturbance of equilibrium between the buffer gas flow and cluster drift, and the attachment of charged clusters to the chamber walls — the factors determining the output parameters of the cluster beam escaping the magnetron chamber — are analyzed. Cluster deposition on а solid surface and on dusty plasma particles is considered.

Fulltext pdf (520 KB)
Fulltext is also available at DOI: 10.1070/PU2007v050n05ABEH006138
PACS: 36.40.−c, 52.80.Sm, 61.46.Bc (all)
DOI: 10.1070/PU2007v050n05ABEH006138
URL: https://ufn.ru/en/articles/2007/5/a/
000249374100001
2-s2.0-34548594195
2007PhyU...50..455K
Citation: Kashtanov P V, Smirnov B M, Hippler R "Magnetron plasma and nanotechnology" Phys. Usp. 50 455–488 (2007)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Оригинал: Каштанов П В, Смирнов Б М, Хипплер Р «Магнетронная плазма и нанотехнология» УФН 177 473–510 (2007); DOI: 10.3367/UFNr.0177.200705a.0473

References (254) Cited by (107) ↓ Similar articles (20)

  1. Wang Y, Toulkeridou E et al Powder Technology 484 122998 (2026)
  2. Coroa J, Sanzone G et al Surface And Coatings Technology 539 133867 (2026)
  3. ’B’?р’?’?’?ya’? ’B ’l Proceedings of NAS RA Physics 61 (3) 470 (2026)
  4. Hanu?l Jan, Starosta Vilém ’? ’?р Journal of Vacuum Science & Technology A 43 (6) (2025)
  5. Fedoseev A V, Filippov A V et al Nanomaterials 15 (23) 1802 (2025)
  6. Nedyorkin V V, Lavrenyuk A S, Shemchenko E I Bull. Russ. Acad. Sci. Phys. 89 (11) 2129 (2025)
  7. Coroa J, Sanzone G et al Surface And Coatings Technology 500 131892 (2025)
  8. Ahadi A M, Tjardts T et al Vacuum 231 113794 (2025)
  9. Curda P, Horak A et al Nanoscale 17 (39) 22860 (2025)
  10. Bohra M, Giaremis S et al Advanced Science 11 (43) (2024)
  11. Gushenets V I, Bugaev A S et al Tech. Phys. 69 (7) 1967 (2024)
  12. Knabl F, Bandl Ch et al Journal of Vacuum Science & Technology A 42 (2) (2024)
  13. Curda P, Hippler R et al Surface And Coatings Technology 473 130045 (2023)
  14. Curda P, Kaftan D et al Applied Surface Science 640 158307 (2023)
  15. Okunev V D, Szymczak H Journal of Applied Physics 133 (8) (2023)
  16. Grammatikopoulos P, Bouloumis T, Steinhauer S Phys. Chem. Chem. Phys. 25 (2) 897 (2023)
  17. Zikmund Tom?l?l, Bul?e?T Ji?T?e ’? ’?р Materials 16 (4) 1591 (2023)
  18. Arnas C, Guidez T et al Physics of Plasmas 29 (7) (2022)
  19. Sanzone G, Field S et al ACS Appl. Mater. Interfaces 14 (8) 10154 (2022)
  20. Batkov?l ?i, Koz?lk T ’? ’?р Surface And Coatings Technology 417 127196 (2021)
  21. Sanzone G, Yin J et al Review of Scientific Instruments 92 (3) (2021)
  22. Sanzone G, Yin J, Sun H Front. Chem. Sci. Eng. 15 (6) 1360 (2021)
  23. Longo S, Micca L G et al Nanotechnology 32 (14) 145604 (2021)
  24. Okunev V D, Samoilenko Z A et al Phys. Solid State 63 (4) 603 (2021)
  25. Abduev A, Akhmedov A et al J. Phys.: Conf. Ser. 2056 (1) 012046 (2021)
  26. Ferrari P, Sanzone G et al Nanoalloys (2020) p. 1
  27. "Transport de nanoparticules dans un plasma de décharge magnétron" Aix-Marseille, (2020)
  28. Chami A, Arnas C J. Plasma Phys. 86 (5) (2020)
  29. Okunev V D, Samoilenko Z A et al Tech. Phys. Lett. 46 (1) 42 (2020)
  30. Soler-Morala J, Jefremovas E M et al Applied Nano 1 (1) 87 (2020)
  31. Frontiers Of Nanoscience Vol. Cluster Beam Deposition of Functional Nanomaterials and DevicesCluster nanoportals for the hydrogenation of underlying nanofilms15 (2020) p. 87
  32. Gabriela C L, Acsente T et al Nanomaterials - Toxicity, Human Health and Environment Chapter 5 (2020)
  33. Arnas C, Chami A et al Physics of Plasmas 26 (5) (2019)
  34. Grammatikopoulos P Current Opinion In Chemical Engineering 23 164 (2019)
  35. Hippler R, Denker Ch Plasma Sources Sci. Technol. 28 (3) 035008 (2019)
  36. Prudnikov A, Pashkevich Yu et al Advances in Thin Films, Nanostructured Materials, and Coatings Lecture Notes In Mechanical Engineering Chapter 20 (2019) p. 197
  37. Kovtun Yu V, Shapoval A N, Siusko Y V Plasma Sources Sci. Technol. 28 (10) 105009 (2019)
  38. Gradov V M, Zimin A M et al Phys. Atom. Nuclei 82 (10) 1376 (2019)
  39. Filippov A V, Pal A F et al J. Phys.: Conf. Ser. 946 012149 (2018)
  40. Hippler R, Denker Ch Plasma Sources Sci. Technol. 27 (6) 065010 (2018)
  41. Herrendorf A-P, Sushkov V, Hippler R Journal of Applied Physics 121 (12) (2017)
  42. Lukin V G, Khvostenko O G ’pс’?’?kh’? ф’?’?’?ch’?с’?’?kh ’?’?у’? 187 (09) 981 (2017) [Lukin V G, Khvostenko O G Phys.-Usp. 60 (9) 911 (2017)]
  43. Abduev A Kh, Akhmedov A K et al Crystallogr. Rep. 62 (1) 133 (2017)
  44. Smirnov B M ’pс’?’?kh’? ф’?’?’?ch’?с’?’?kh ’?’?у’? 187 (12) 1329 (2017) [Smirnov B M Phys.-Usp. 60 (12) 1236 (2017)]
  45. Budaev V P Physics Letters A 381 (43) 3706 (2017)
  46. Pashkevich Yu, Prudnikov A et al 2017 IEEE 7th International Conference Nanomaterials: Application & Properties (NAP), (2017) p. 02NTF30-1
  47. Budaev V P Jetp Lett. 105 (5) 307 (2017)
  48. "Implémentation d’un générateur de nanoparticules en phase gazeuse fondé sur la pulvérisation cathodique magnétron pour la synthèse de films minces nanocomposities céramique/nanoparticules métalliques" Limoges, (2017)
  49. Haberland H Gas??BPhase Synthesis of Nanoparticles 1 (2017) p. 1
  50. Stranak V, Hippler R Gas??BPhase Synthesis of Nanoparticles 1 (2017) p. 203
  51. Aussems D U B, Khrapak S A et al Physics of Plasmas 24 (11) (2017)
  52. Hippler R, Cada M et al J. Phys. D: Appl. Phys. 50 (44) 445205 (2017)
  53. Sushkov V, Herrendorf A-P, Hippler R J. Phys. D: Appl. Phys. 49 (42) 425201 (2016)
  54. Mokhnenko ’a  ’?, Varyukhin V  M ’? ’?р Metallofiz. Noveishie Tekhnol. 37 (6) 741 (2016)
  55. Ahadi A M, Hinz A et al Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 34 (2) (2016)
  56. Ferrec A, Kéraudy Julien, Jouan P-Y Applied Surface Science 390 497 (2016)
  57. Grammatikopoulos P, Steinhauer S et al Advances In Physics: X 1 (1) 81 (2016)
  58. Zeniieh D, Rostas A M et al Plasma Process. Polym. 13 (7) 744 (2016)
  59. Ganeva M, Kashtanov P V et al ’pс’?’?kh’? ф’?’?’?ch’?с’?’?kh ’?’?у’? 185 (6) 619 (2015) [Ganeva M, Kashtanov P V et al Phys.-Usp. 58 (6) 579 (2015)]
  60. Ivanov A S, Pal A F et al Russ J Gen Chem 85 (5) 1270 (2015)
  61. Blažek J, Kousal J ’? ’?р J. Phys. D: Appl. Phys. 48 (41) 415202 (2015)
  62. Rogov A V, Kapustin Yu V, Martynenko Yu V Tech. Phys. 60 (2) 283 (2015)
  63. Acsente T, Negrea R F et al Eur. Phys. J. D 69 (6) (2015)
  64. Zhao Ju, Singh V et al Phys. Rev. B 91 (3) (2015)
  65. Smirnov B M, Son E E High Temp 53 (5) 742 (2015)
  66. Baitimbetova B A, Vermenichev B M et al Russ Phys J 58 (3) 394 (2015)
  67. Ganeva M, Kashtanov P V et al Vacuum 110 140 (2014)
  68. Singh V, Cassidy C et al J. Phys. Chem. C 118 (25) 13869 (2014)
  69. Bray K R, Jiao Ch Q, DeCerbo Je N Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 32 (3) (2014)
  70. (International Conference on Micro- and Nano-Electronics 2014) Vol. International Conference on Micro- and Nano-Electronics 2014Surface treatment of polyimide film for metal magnetron deposition in vacuumAlexander A.OrlikovskyV.PetrovD.VertyanovS.TimoshenkovV.Nikolaev9440 (2014) p. 94400A
  71. Drache S, Stranak V et al Journal of Applied Physics 116 (14) (2014)
  72. Maicu M, Schmittgens R et al Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 32 (2) (2014)
  73. Tolstoguzov A B, Drozdov M N et al J Anal Chem 69 (13) 1245 (2014)
  74. Ganeva M, Pipa A V et al Plasma Sources Sci. Technol. 22 (4) 045011 (2013)
  75. Cassidy C, Singh V et al Sci Rep 3 (1) (2013)
  76. Ahadi A M, Zaporojtchenko V et al J Nanopart Res 15 (12) (2013)
  77. Rawat R S IEEE Trans. Plasma Sci. 41 (4) 701 (2013)
  78. Rai A, Mutzke A et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 316 6 (2013)
  79. Ganeva M, Peter T et al Contrib. Plasma Phys. 52 (10) 881 (2012)
  80. Gradov V M, Zimin A M et al Plasma Phys. Rep. 38 (13) 1099 (2012)
  81. Rogov A V, Fanchenko S S Tech. Phys. 57 (2) 286 (2012)
  82. Peter T, Polonskyi O et al Journal of Applied Physics 112 (11) (2012)
  83. Ganeva M, Pipa A V, Hippler R Surface And Coatings Technology 213 41 (2012)
  84. Kudryavtseva E N, Pichugin V F et al J. Surf. Investig. 6 (4) 688 (2012)
  85. Martynenko Yu V, Rogov A V, Shul’ga V I Tech. Phys. 57 (4) 439 (2012)
  86. Nafarizal N, Sasaki K J. Phys. D: Appl. Phys. 45 (50) 505202 (2012)
  87. Sushkov V, Do H T et al Plasma Sources Sci. Technol. 22 (1) 015002 (2012)
  88. Kvasov N T, Pun’ko A V et al J. Surf. Investig. 6 (1) 145 (2012)
  89. Muslimov A E, Butashin A V et al Crystallogr. Rep. 57 (3) 415 (2012)
  90. Straň?lk V?et?’zslav, Block S ’? ’?р Surface And Coatings Technology 205 (8-9) 2755 (2011)
  91. Smirnov B M Uspekhi Fizicheskikh Nauk 181 (7) 713 (2011)
  92. Peter T, Wegner M et al Surface And Coatings Technology 205 S38 (2011)
  93. Goncharov A V, Kashtanov P V High Temp 49 (2) 178 (2011)
  94. Okunev V D, Lewandowski S J et al Phys. Solid State 53 (1) 13 (2011)
  95. Hippler R, Bhattacharyya S R, Smirnov B M Springer Series On Atomic, Optical, And Plasma Physics Vol. Introduction to Complex PlasmasFormation and Deposition of Nanosize Particles on Surfaces59 Chapter 12 (2010) p. 299
  96. Cluster Processes in Gases and Plasmas 1 (2010) p. 423
  97. MOTEGI N, KUREHASHI M et al Japanese Journal Of Environmental Infections 25 (5) 302 (2010)
  98. Kashtanov P V, Smirnov B M, Hippler R EPL 91 (6) 63001 (2010)
  99. Nikolaenko Yu M, Mukhin A B et al Tech. Phys. 55 (8) 1189 (2010)
  100. Kashtanov P V, Smirnov B M High Temp 48 (6) 846 (2010)
  101. Knyazeva A G, Shanin S A Russ Phys J 53 (1) 83 (2010)
  102. Kabaldin Yu G, Seryi S V et al Russ. Engin. Res. 30 (3) 235 (2010)
  103. Ekpe S D, Jimenez F J et al Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 27 (6) 1275 (2009)
  104. Straň?lk V?et?’zslav, Čada Martin ’? ’?р J. Phys. D: Appl. Phys. 42 (10) 105204 (2009)
  105. Berndt J, Kovačević E et al Contrib. Plasma Phys. 49 (3) 107 (2009)
  106. Blonskii I V, Goncharov A A et al Tech. Phys. 54 (7) 1052 (2009)
  107. Lukyanov G A, Nikolaeva L Yu, Bykov N Yu Fullerenes, Nanotubes And Carbon Nanostructures 16 (5-6) 551 (2008)
© 1918–2026 Uspekhi Fizicheskikh Nauk
Email: ufn@ufn.ru Editorial office contacts About the journal Terms and conditions