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Reviews of topical problems


Nonequilibrium 1/f γ noise in conducting films and contacts


National Research University of Electronic Technology (MIET), sq. Shokina 1, Zelenograd, Moscow, 124498, Russian Federation

Work on nonequilibrium flicker-noise (1/f γ noise or NEFN) in conducting films of various materials and in thin-film contacts is reviewed. Experimental methods for studying nonequilibrium flicker fluctuations by separating NEFN from the total noise are suggested. Published results on NEFN in metal and alloy films, Ni/Cr-film and TaxNy-film resistors, and contacts are systematized. It is shown that various kinds of NEFN occur in conducting films. Depending on test conditions, external influences, and the film microstructure, both stationary and non-stationary NEFNs are observed. The use of 1/f γ noise measurements for nondestructively controlling the quality of thin-film conductors is substantiated. For most of the passive IC components (thin-film conductors, resistive layers, contacts), NEFN makes a much more informative quality indicator than equilibrium flicker-noise.

Fulltext pdf (525 KB)
Fulltext is also available at DOI: 10.1070/PU2003v046n05ABEH001244
PACS: 05.40.Ca, 72.70.+m, 73.50.Td, 85.40.Qx (all)
DOI: 10.1070/PU2003v046n05ABEH001244
URL: https://ufn.ru/en/articles/2003/5/a/
000185206600001
Citation: Zhigal’skii G P "Nonequilibrium 1/f γ noise in conducting films and contacts" Phys. Usp. 46 449–471 (2003)
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Оригинал: Жигальский Г П «Неравновесный 1/f γ-шум в проводящих пленках и контактах.» УФН 173 465–490 (2003); DOI: 10.3367/UFNr.0173.200305a.0465

References (97) ↓ Cited by (36) Similar articles (13)

  1. Johnson J B Phys. Rev. 26 71 (1925)
  2. Schottky W Phys. Rev. 28 74 (1926)
  3. Bochkov G N, Kuzovlev Yu E Usp. Fiz. Nauk 141 151 (1983) [Sov. Phys. Usp. 26 829 (1983)]
  4. Hooge F N, Kleinpenning T G M, Vandamme L K J Rep. Prog. Phys. 44 479 (1981)
  5. Dutta P, Horn P M Rev. Mod. Phys. 53 497 (1981)
  6. Kogan Sh M Usp. Fiz. Nauk 145 285 (1985) [Sov. Phys. Usp. 28 170 (1985)]
  7. Weissman M B Rev. Mod. Phys. 60 537 (1988)
  8. Zhigal’skii G P Usp. Fiz. Nauk 167 623 (1997) [Phys. Usp. 40 599 (1997)]
  9. Hooge F N IEEE Trans. Electron Dev. ED-41 1926 (1994)
  10. Voss R F, Clarke J Phys. Rev. Lett. 36 42 (1976)
  11. Gulyaev A M, Kukoev I V, Miroshnikova I N, in Materialy Dokladov Mezhdunarodnogo Nauchno-Tekhnicheskogo Seminara "Shumovye i Degradatsionnye Protsessy v Poluprovodnikovykh Priborakh" ("Noise and Degradation Processes in Semiconductor Devices". Proc. Intern. Scientific and Technical Workshop, Moscow: MNTORES, 2001) p. 21
  12. Neri B, Diligenti A, Bagnoli P E IEEE Trans. Electron Dev. ED-34 2317 (1987)
  13. Touboul A, Verdier F, Herve Y, in Noise in Physical Systems and 1/f Fluctuations: Proc. of the Intern. Conf., Kyoto, Japan, 1991 (Eds T Musha, S Sato, M Yamamoto, Tokyo: Ohmsha, 1992) p. 73
  14. Neri B, Ciofi C, Dattilo V IEEE Trans. Electron Dev. ED-44 1454 (1997)
  15. Hooge F N, Hoppenbrouwers A M H Physica 45 386 (1969)
  16. Hooge F N Physica B+C 83 14 (1976)
  17. Hooge F N, in Noise in Physical Systems and 1/f Fluctuations: Proc. of the 14th Intern. Conf., Leuven, Belgium, 14 – 18 July, 1997 (Eds C Claeys, E Simoen, Singapore: World Scientific, 1997) p. 3
  18. Giordano N Rev. Solid State Sci. 3 27 (1989)
  19. Musha T, in Proc. of the 15th Intern. Conf. on Noise in Physical Systems and 1/f Fluctuations, Hong Kong, Aug. 23 – 26, 1999 (Ed. C Surya, Hong Kong: Polytechnic Univ., 1999) p. 18
  20. Bokshtein B S Diffuziya v Metallakh (Diffusion in Metals, Moscow: Metallurgiya, 1978)
  21. Girifalco L A Statistical Physics of Materials (New York: Wiley, 1973) [Translated into Russian (Moscow: Mir, 1975)]
  22. Potemkin V V, Bakshi I S, Zhigal’skii G P Radiotekh. Elektron. 28 221 (1983) [Radio Eng. Electron. Phys. 28 89 (1983)]
  23. Van der Ziel A Fluctuation Phenomena in Semi-Conductors (New York: Academic Press, 1959) [Translated into Russian (Moscow: IL, 1961)]
  24. Buckingham M J Noise in Electronic Devices and Systems (Chichester: E. Horwood, 1983) [Translated into Russian (Moscow: Mir, 1986)]
  25. Zhigal’skii G P Pis’ma Zh. Eksp. Teor. Fiz. 54 510 (1991) [JETP Lett. 54 513 (1991)]
  26. Zhigalskii G P, in Noise in Physical Systems and 1/f Fluctuations: Proc. of the Intern. Conf., Kyoto, Japan, 1991 (Eds T Musha, S Sato, M Yamamoto, Tokyo: Ohmsha, 1992) p. 39
  27. Zhigal’skii G P Zh. Fiz. Khim. 69 1355 (1995)
  28. Zhigal’skii G P, Jones B K, in Proc. of the 15th Intern. Conf. on Noise in Physical Systems and 1/f Fluctuations, Hong Kong, Aug. 23 – 26, 1999 (Ed. C Surya, Hong Kong: Polytechnic Univ., 1999) p. 172
  29. Chopra K L Thin Film Phenomena (New York: McGraw-Hill, 1969) [Translated into Russian (Moscow: Mir, 1972)]
  30. Zhigal’skii G P, Jones B K Fizicheskie Yavleniya v Tonkikh Metallicheskikh Plenkakh (The Physical Properties of Thin Metal Films, Moscow: Izd. MIET, 1996) [Translated into English (London: Taylor & Francis, 2003)]
  31. Zhigal’skii G P, Karev A V Radiotekh. Elektron. 44 222 (1999) [J. Commun. Technol. El. 44 206 (1999)]
  32. Kirbi P L Electron. Eng. 37 722 (1965)
  33. Zhigal’skii G P, in Fluctuation Phenomena in Physical Systems: Proc. of the 7th Vilnius Conf., Palanga, Lithuania, 4 – 7 Oct., 1994 (Ed. V Palenskis, Vilnius: Vilnius Univ. Press, 1994) p. 285
  34. Jones B K, Zhigal’skii G P, in Noise in Physical Systems and 1/f Fluctuations: ICNF 2001: Proc. of the 16th Intern. Conf., Gainesville, Florida, USA, 22 – 25 Oct. 2001 (Ed. G Bosman, River Edge, NJ: World Scientific, 2001) p. 73
  35. Lorteije J H J, Hoppenbrouwers A M H Philips Res. Rep. 26 29 (1971)
  36. Jones B K, Francis J D J. Phys. D: Appl. Phys. 8 1172 (1975)
  37. Palenskis V P, Leont’ev G E, Mikolaitis G S Radiotekh. Elektron. 21 2433 (1976)
  38. Jones B K Electron. Lett. 12 110 (1976)
  39. Malakhov A N Fluktuatsii v Avtokolebatel’nykh Sistemakh (Fluctuations in Self-Oscillatory Systems, Moscow: Nauka, 1968)
  40. Zhigal’skii G P, Karev A V Oboronnyi Kompleks — Nauchno-Tekhnicheskomu Progressu Rossii (3 – 4) 50 (1997)
  41. Thompson M W Defects and Radiation Damage in Metals (London: Cambridge Univ. Press, 1969) [Translated into Russian (Moscow: Nauka, 1983)]
  42. Zhigal’skii G P, in Materialy Dokladov Mezhdunarodnogo Nauchno-Tekhnicheskogo Seminara "Shumovye i Degradatsionnye Protsessy v Poluprovodnikovykh Priborakh" ("Noise and Degradation Processes in Semiconductor Devices". Proc. Intern. Scientific and Technical Workshop, Moscow: MNTORES, 2001) p. 152
  43. Dul’nev G N, Semyashkin E M Teploobmen v Radioelektronnykh Apparatakh (Heat Exchange in Radio Electronic Devices, Leningrad: Energiya, 1968)
  44. Schwarz J A et al. J. Appl. Phys. 70 1561 (1991)
  45. Potemkin V V, Stepanov A V, Zhigal’skii G P, in Noise in Physical Systems and 1/f Fluctuations (AIP Conf. Proc., Vol. 285, Eds P H Handel, A L Chung, New York: American Institute of Physics, 1993) p. 61
  46. Sikula J, Touboul A, in Noise in Physical Systems and 1/f Fluctuations (AIP Conf. Proc., Vol. 285, Eds P H Handel, A L Chung, New York: American Institute of Physics, 1993) p. 206
  47. Bagnoli P E et al. J. Appl. Phys. 63 1448 (1988)
  48. Neri B et al., in Noise in Physical Systems: Including 1/f Noise, Biological Systems and Membranes: Proc. of the 10th Intern. Conf., Aug. 21 – 25, 1989, Budapest, Hungary (Ed. A Ambrózy, Budapest: Akadémiai Kiadó, 1990) p. 237
  49. Chen T M, Fang P, Cottle J G, in Noise in Physical Systems: Including 1/f Noise, Biological Systems and Membranes: Proc. of the 10th Intern. Conf., Aug. 21 – 25, 1989, Budapest, Hungary (Ed. A Ambrózy, Budapest: Akadémiai Kiadó, 1990) p. 515
  50. Smith R G, Biery G A, Rodbell K P Appl. Phys. Lett. 65 315 (1994)
  51. Chen T M, in Noise in Physical Systems and 1/f Fluctuations (AIP Conf. Proc., Vol. 285, Eds P H Handel, A L Chung, New York: American Institute of Physics, 1993) p. 17
  52. Yassine A M, Chen T M, in Proc. of the 13th Conf. "Noise in Physical Systems and 1/f Fluctuations" (Eds V Bareikis, R Katilius, Singapore: World Scientific, 1995) p. 614
  53. Ciofi C, Diligenti A, Neri B, in Proc. of the 13th Conf. "Noise in Physical Systems and 1/f Fluctuations" (Eds V Bareikis, R Katilius, Singapore: World Scientific, 1995) p. 618
  54. Diligenti A et al. IEEE Electron Dev. Lett. EDL-6 606 (1985)
  55. Celik-Butler Z, in Noise in Physical Systems and 1/f Fluctuations (AIP Conf. Proc., Vol. 285, Eds P H Handel, A L Chung, New York: American Institute of Physics, 1993) p. 200
  56. Chen T M, in Noise in Physical Systems and 1/f Fluctuations (AIP Conf. Proc., Vol. 285, Eds P H Handel, A L Chung, New York: American Institute of Physics, 1993) p. 17
  57. Yassine A M, Chen C T-M IEEE Trans. Electron Dev. ED-44 180 (1997)
  58. D’Erl F, Rosenberg R, in Physics of Thin Films: Advances in Research and Development Vol. 7 (Eds G Hass, M Francombe, R Hoffman, New York: Academic Press, 1973) [Translated into Russian (Moscow: Mir, 1977) p. 284]
  59. Poate J M, Tu K N, Mayer J W (Eds) Thin Films. Interdiffusion and Reactions (New York: Wiley, 1978) [Translated into Russian (Moscow: Mir, 1982)]
  60. Dagge K et al., in Noise in Physical Systems and 1/f Fluctuations (AIP Conf. Proc., Vol. 285, Eds P H Handel, A L Chung, New York: American Institute of Physics, 1993) p. 603
  61. Jones B K Adv. Electron. El. Phys. 87 201 (1994)
  62. Zhigal’skii G P, Bakshi I S Radiotekh. Elektron. 25 771 (1980) [Radio Eng. Electron. Phys. 25 61 (1980)]
  63. Koch R H, Lloyd J R, Cronin J Phys. Rev. Lett. 55 2487 (1985)
  64. Ochs E et al., in Noise in Physical Systems and 1/f Fluctuations: Proc. of the 14th Intern. Conf., Leuven, Belgium, 14 – 18 July, 1997 (Eds C Claeys, E Simoen, Singapore: World Scientific, 1997) p. 415
  65. Volin T E, Lie K H, Balluffi R W Acta Metall. 19 263 (1971)
  66. Seeger A, Stoll H, in Proc. of the 15th Intern. Conf. on Noise in Physical Systems and 1/f Fluctuations, Hong Kong, Aug. 23 – 26, 1999 (Ed. C Surya, Hong Kong: Polytechnic Univ., 1999) p. 162
  67. Neri B, Olivo P, Riccò B Appl. Phys. Lett. 51 2167 (1987)
  68. Zhigal’skii G P Radiotekh. Elektron. 44 1413 (1999) [J. Commun. Technol. El. 44 1301 (1999)]
  69. Smirnov V I, Mata F Yu Teoriya Konstruktsii Kontaktov v Elektronnoi Apparature (The Theory of Contact Constructions in Electronic Devices, Moscow: Sovetskoe Radio, 1974)
  70. Zhigal’skii G P, Zaitsev V V Izv. Vyssh. Uchebn. Zaved. Elektronika (5) 79 (1997)
  71. Osokin N E Izv. Vyssh. Uchebn. Zaved. Elektronika (1 – 2) 119 (1999)
  72. Zhigal’skii G P, Karev A V, Kosenko V E Elektronnaya Tekhnika. Ser. 6. Materialy (1) 70 (1992)
  73. Holland L (Ed.) Thin Film Microelectronics (London: Wiley, 1965) [Translated into Russian (Moscow: Mir, 1968)]
  74. Palatnik L S, Fuks M Ya, Kosevich V M Mekhanizm Obrazovaniya i Struktura Kondensirovannykh Plenok (Mechanism of Fabrication and Structure of Condensed Films, Moscow: Nauka, 1972)
  75. Zhigal’skii G P, Karev A V, in Proc. of the 13th Conf. "Noise in Physical Systems and 1/f Fluctuations" (Eds V Bareikis, R Katilius, Singapore: World Scientific, 1995) p. 323
  76. Zhil’kov E A et al., in Poluprovodnikovye Pribory i Integral’nye Skhemy (Semiconductor Devices and Integrated Circuits, Sbornik Nauchnykh Trudov po Problemam Mikroelektroniki (Collected Works on Microelectronics), Issue 27, Ed. A A Orlikovskii, Moscow: MIET, 1976) p. 127
  77. Potemkin V V et al., in Fluctuation Phenomena in Physical Systems: Proc. of the 6th Sci. Conf., Sept. 23 – 27, 1991, Palanga, Lithuania (Ed. V Palenskis, Vilnius: Vilnius Univ. Press, 1991) p. 79
  78. Zhigal’skii G P, Kurov G A, Siranashvili I Sh Izv. Vyssh. Uchebn. Zaved. Radiofiz. 26 207 (1983) [Radiophys. Quantum Electron. 26 162 (1983)]
  79. Kurov G A, Zhigal’skii G P, Siranashvili I Sh, in Puti Povysheniya Stabil’nosti i Nadezhnosti Mikroelementov i Mikroskhem. Materialy 2-go Vsesoyuz. Nauchno-Tekhnicheskogo Seminara (Approaches to Improving Stability and Reliability of Microelements and Microcircuits. Proc. 2nd All-Union Scientific and Technical Workshop, Ryazan’: Izd. RRTI, 1982) p. 41
  80. Zhigal’skii G P, Fedorov A S Izv. Vyssh. Uchebn. Zaved. Radiofiz. 28 1192 (1985) [Radiophys. Quantum Electron. 28 831 (1985)]
  81. Briggmann J et al., in Noise in Physical Systems and 1/f Fluctuations (AIP Conf. Proc., Vol. 285, Eds P H Handel, A L Chung, New York: American Institute of Physics, 1993) p. 607
  82. Dagge K et al., in Proc. of the 13th Conf. "Noise in Physical Systems and 1/f Fluctuations" (Eds V Bareikis, R Katilius, Singapore: World Scientific, 1995) p. 603
  83. Pelz J, Clarke J Phys. Rev. Lett. 55 738 (1985)
  84. Fleetwood D M, Giordano N Phys. Rev. B 28 3625 (1983)
  85. Zhigal’skii G P, Sokov Yu E, Tomson N G, in Fizika Poluprovodnikov i Mikroelektronika (Physics of Semiconductors and Microelectronics, Ryazan’: Izd. RRTI, 1977) p. 63
  86. Zhigal’skii G P, in Noise in Physical Systems and 1/f Fluctuations (AIP Conf. Proc., Vol. 285, Eds P H Handel, A L Chung, New York: American Institute of Physics, 1993) p. 81
  87. Zhigal’skii G P, Sokov Yu E, Tomson N G Radiotekh. Elektron. 24 410 (1979) [Radio Eng. Electron. Phys. 24 137 (1979)]
  88. Akabane H, Agu M, in Noise in Physical Systems and 1/f Fluctuations: ICNF 2001: Proc. of the 16th Intern. Conf., Gainesville, Florida, USA, 22 – 25 Oct. 2001 (Ed. G Bosman, River Edge, NJ: World Scientific, 2001) p. 99
  89. Potemkin V V, Bakshi I S, Zhigal’skii G P, in Elektrofluktuatsionnaya Diagnostika Materialov i Izdelii Elektronnoi Tekhniki (Electrofluctuation Diagnosis of Electronic Devices, Moscow: Izd. TsNIIITEI, 1981) p. 52
  90. Chen T M, Djeu T P, Moore R D, in Proc. on Reliability Physics, Orlando, 1985 (New York: IEEE Publ., 1985) p. 87
  91. Jones B K, Xu Y Z Microelectron. Reliab. 33 1829 (1993)
  92. Sikula J et al., in Proc. of the 15th Intern. Conf. on Noise in Physical Systems and 1/f Fluctuations, Hong Kong, Aug. 23 – 26, 1999 (Ed. C Surya, Hong Kong: Polytechnic Univ., 1999) p. 154
  93. Sedlakova V et al., in Noise in Physical Systems and 1/f Fluctuations: ICNF 2001: Proc. of the 16th Intern. Conf., Gainesville, Florida, USA, 22 – 25 Oct. 2001 (Ed. G Bosman, River Edge, NJ: World Scientific, 2001) p. 747
  94. Timashev S F, in Noise in Physical Systems and 1/f Fluctuations: ICNF 2001: Proc. of the 16th Intern. Conf., Gainesville, Florida, USA, 22 – 25 Oct. 2001 (Ed. G Bosman, River Edge, NJ: World Scientific, 2001) p. 775
  95. Timashev S F Zh. Fiz. Khim. 75 1900 (2001) [Russ. J. Phys. Chem. 75 1742 (2001)]
  96. Parkhutik V P, Timashev S F Elektrokhimiya 36 1378 (2000) [Russ. J. Electrochem. 36 1221 (2000)]
  97. Kostuchenko G T, Timashev S F, in Chaotic Universe (Advanced Ser. in Astrophys. and Cosmology, Vol. 10, Eds V G Gurzadyan, R Ruffini, Singapore: World Scientific, 2000) p. 579
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