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Энциклопедия полупроводниковL a n d о l t-B ö r n s t e i n . N u m e r i c a l D a t a and F u n c t i o n a l R e l a t i o n s h i p s in S c i e n c e a n d T e c h n o l o g y . New Series/
Eds R.-H. Hellwege, O. Madelung. — Group III: Crystal and Solid State Physics. V. 17:
Semiconductors. Subvolume c: Technology of Si, Ge and SiC/Ed. M. Schulz, H. Weiss. —
Berlin; Heidelberg; New York; Tokyo: Springer-Verlag, 1984. — 533 p.
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