PACS numbers

85.40.Sz Deposition technology
  1. Yu.B. Bolkhovityanov, O.P. Pchelyakov “GaAs epitaxy on Si substrates: modern status of research and engineeringPhys. Usp. 51 437–456 (2008)
    61.72.Lk, 62.25.−g, 81.05.Cy, 81.05.Ea, 81.15.−z, 85.40.Sz (all)
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