Evgeny Yurievich Grachev

Email:

JSC Nanotronica
Publication years: 0
Address: Panfilovsky prosp., build. 10, off. 571, Moscow, Zelenograd, 124460, Russian Federation

Ryazan State Radio Engineering University named after V.F. Utkin
Publication years: 0
Address: Gagarina Street 59/1, Ryazan, 390005, Russian Federation
Phone: +7 (4912) 72 03 03
Website: www.rsreu.ru
Email:

Accepted articles

S.L. Andrianov, E.Yu. Grachev, A.A. Trubitsyn “Electron beam inspection of semiconductor wafers” Phys. Usp., accepted

See also: A.A. Trubitsyn, S.L. Andrianov

PACS: 07.78.+s, 07.50.-e