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Issue 4, 2025
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Nikolai Alekseevich Djuzhev
Email:
dyuzhev@ckp-miet.ru
National Research University of Electronic Technology (MIET)
Address:
sq. Shokina 1, Zelenograd, Moscow, 124498, Russian Federation
Phone:
+7 (499) 731 44 41
Fax:
+7 (499) 710 22 33
Website:
miet.ru
Email:
netadm@miee.ru
Articles
A.A. Dedkova, I.V. Florinsky, N.A. Djuzhev “
Approaches to determining curvature of wafers by their topography
”
Phys. Usp.
65
706–722 (2022)
See also:
A.A. Dedkova
,
I.V. Florinsky
PACS:
68.35.Gy
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