Anna Aleksandrovna Dedkova

National Research University of Electronic Technology (MIET)
Address: sq. Shokina 1, Zelenograd, Moscow, 124498, Russian Federation
Phone: +7 (499) 731 44 41
Fax: +7 (499) 710 22 33
Website: miet.ru

Articles

A.A. Dedkova, I.V. Florinsky, N.A. Djuzhev “Approaches to determining curvature of wafers by their topography” Phys. Usp. 65 706–722 (2022)