Accepted articles

Instruments and methods of investigation

Spectroscopy of small gas components of non-equilibrium low-temperature plasma

Lebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, Moscow, 119991, Russian Federation

The state of the art and prospects for the development of quantitative optical spectroscopy methods for analyzing the composition of small chemically active components of a nonequilibrium plasma are discussed. The possibilities of the methods are considered in their combination with the conditions of applicability both for fundamental research in the field of plasma physics and chemistry, and for monitoring the performance of technological processes in reactors in the interests of power engineering, micro-, and nano-electronics, medicine, the creation of optical coatings, the generation of active radicals and excited particles.

Keywords: spectroscopy, plasma, equilibrium
PACS: 29.30.−h
DOI: 10.3367/UFNe.2021.07.039026
Citation: Ochkin V N "Spectroscopy of small gas components of non-equilibrium low-temperature plasma" Phys. Usp., accepted

Received: 4th, June 2021, revised: 22nd, July 2021, 23rd, July 2021

Оригинал: Очкин В Н «Спектроскопия малых газовых составляющих неравновесной низкотемпературной плазмы» УФН, принята к публикации; DOI: 10.3367/UFNr.2021.07.039026

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