Nanomechanical resonators

Ya.S. Greenberg^a, Yu.A. Pashkin^b, c, d, E. Il’ichev^e
^aNovosibirsk State Technical University, pr. K. Marksa 20, Novosibirsk, 630092, Russian Federation
^bNEC Green Innovation Research Laboratories and RIKEN Advanced Science Institute, Tsukuba, Ibaraki, Japan
^cDepartment of Physics, Lancaster University, Lancaster, United Kingdom
^dLebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, Moscow, 119991, Russian Federation
^eInstitute of Photonic Technology, Albert-Einstein-Strasse 9, Jena, D-07702, Germany

We review the current state of research into the development of nanomechanical resonators and their application as components of nanoelectromechanical and optomechanical systems for the highly sensitive detection and visualization of material structure. Methods for the manufacture and characterization of nanoscale mechanical resonators are described. We discuss quantum properties of nanomechanical resonators and dynamical cooling schemes for suppressing fluctuations in order to increase the threshold sensitivity of optomechanical and electromechanical systems.

PACS: 61.46.−w, 62.25.−g, 81.07.−b, 81.07.Oj (all)
DOI: 10.3367/UFNe.0182.201204c.0407
URL: https://ufn.ru/en/articles/2012/4/c/
Web of Science

000306528000003
ADS NASA

2012PhyU...55..382G
Citation: Greenberg Ya S, Pashkin Yu A, Il’ichev E "Nanomechanical resonators" Phys. Usp. 55 382–407 (2012)

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Received: 21st, May 2011, revised: 4th, November 2011, accepted: 16th, November 2011

Оригинал: Гринберг Я С, Пашкин Ю А, Ильичёв Е В «Наномеханические резонаторы» УФН 182 407–436 (2012); DOI: 10.3367/UFNr.0182.201204c.0407