O.P. Pchelyakov Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences, prosp. Akad. Lavrenteva 13, Novosibirsk, 630090, Russian Federation
TY JOUR
TI Molecular beam epitaxy: equipment, devices, technology
AU Pchelyakov, O. P.
PB Physics-Uspekhi
PY 2000
JO Physics-Uspekhi
JF Physics-Uspekhi
JA Phys. Usp.
VL 43
IS 9
SP 923-925
UR https://ufn.ru/en/articles/2000/9/d/
ER https://doi.org/10.1070/PU2000v043n09ABEH000790