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@article{Timofeev:1990, author = {V. B. Timofeev}, title = {Current state of semiconductor silicon technology and material science}, publisher = {Physics-Uspekhi}, year = {1990}, journal = {Phys. Usp.}, volume = {33}, number = {6}, pages = {492-493}, url = {https://ufn.ru/en/articles/1990/6/g/}, doi = {10.1070/PU1990v033n06ABEH002604} }
Оригинал: Тимофеев В Б «Современное состояние технологии и материаловедения полупроводникового кремния» УФН 160 (6) 168–170 (1990); DOI: 10.3367/UFNr.0160.199006g.0168