Current state of semiconductor silicon technology and material science
V.B. Timofeev Osipyan Institute of Solid State Physics, Russian Academy of Sciences, Akademika Osip'yana str. 2, Chernogolovka, Moscow Region, 142432, Russian Federation
TY JOUR
TI Current state of semiconductor silicon technology and material science
AU Timofeev, V. B.
PB Physics-Uspekhi
PY 1990
JO Physics-Uspekhi
JF Physics-Uspekhi
JA Phys. Usp.
VL 33
IS 6
SP 492-493
UR https://ufn.ru/en/articles/1990/6/g/
ER https://doi.org/10.1070/PU1990v033n06ABEH002604