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Current state of semiconductor silicon technology and material science


Institute of Solid-State Physics, Russian Academy of Sciences, Chernogolovka, Moscow Region, Russian Federation
Text can be downloaded in Russian. English translation is available here.
PACS: 01.30.Vv, 85.40.−e, 81.10.−h, 81.15.−z (all)
DOI: 10.1070/PU1990v033n06ABEH002604
URL: https://ufn.ru/en/articles/1990/6/g/
Citation: Timofeev V B "Current state of semiconductor silicon technology and material science" Sov. Phys. Usp. 33 (6) 492–493 (1990)
BibTexBibNote ® (generic) BibNote ® (RIS)MedlineRefWorks
TY JOUR
TI Current state of semiconductor silicon technology and material science
AU Timofeev, V. B.
PB Physics-Uspekhi
PY 1990
JO Physics-Uspekhi
JF Physics-Uspekhi
JA Phys. Usp.
VL 33
IS 6
SP 492-493
UR https://ufn.ru/en/articles/1990/6/g/
ER https://doi.org/10.1070/PU1990v033n06ABEH002604

Оригинал: Тимофеев В Б «Современное состояние технологии и материаловедения полупроводникового кремния» УФН 160 (6) 168–170 (1990); DOI: 10.3367/UFNr.0160.199006g.0168

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