Current state of semiconductor silicon technology and material science
V.B. Timofeev Osipyan Institute of Solid State Physics, Russian Academy of Sciences, Akademika Osip'yana str. 2, Chernogolovka, Moscow Region, 142432, Russian Federation
%0 Journal Article
%T Current state of semiconductor silicon technology and material science
%A V. B. Timofeev
%I Physics-Uspekhi
%D 1990
%J Phys. Usp.
%V 33
%N 6
%P 492-493
%U https://ufn.ru/en/articles/1990/6/g/
%U https://doi.org/10.1070/PU1990v033n06ABEH002604