TY JOUR
TI Physics and technology of submicron structures
AU Idlis, B. G.
PB Physics-Uspekhi
PY 1989
JO Physics-Uspekhi
JF Physics-Uspekhi
JA Phys. Usp.
VL 32
IS 9
SP 834-834
UR https://ufn.ru/en/articles/1989/9/i/
ER https://doi.org/10.1070/PU1989v032n09ABEH002763